During operation,filtered compressed air forms a uniform air film between the air bearings and the ceramic guide surfaces,allowing the moving components to operate without direct mechanical contact.Compared with conventional rolling guidewaysthe air-bearing structure reduces friction,low-speed stick-slip,mechanical wear,and lubrication induced disturbances, helping improve continuous scanning smoothness,velocity consistencyand repeatable motion performance.
The core ceramic components can be precision ground,lapped and polished to control flatness, parallelism,perpendicularity,surface roughness and critical mounting datums.Platform dimensions, axis configurations, mounting holes, pneumatic interfaces, and drive and feedback interfaces can be customized to suit the available equipment space and motion requirements.
Product Features:
1. Non-Contact Air-Bearing Motion
2. High-Purity Alumina Ceramic Guideway and Datum Surfaces
3. Micron-Level Geometric Accuracy Control
4. Smooth Scanning and Stable Velocity Control
5. Supports Long-Term Accuracy Retention
6. Suitable for Clean and Low-Contamination Environments
7. Configurable Multi-Axis Architecture
Specifications:
| Platform Series | Size Class | Flatness | Parallelism | Perpendicularity | Remarks |
|---|---|---|---|---|---|
| INV Series | 600 Series | 2 μm | 2 μm | 2 μm | Customized |
| INV Series | 800 Series | 2 μm | 2 μm | 2 μm | Customized |
| INV Series | 1200 Series | 2 μm | 2 μm | 2 μm | Customized |
Typical Applications
Precision Metrology and Inspection Equipment
Used as a motion module for precision dimensional inspection, surface profile measurement, non-contact measurement, probe scanning, and coordinate measuring machines (CMM).
Semiconductor and Wafer Inspection
Used for wafer inspection, substrate scanning, photomask inspection, package inspection, and precision positioning and handling platforms in semiconductor equipment.
Optical and Photonics Systems
Used for beam alignment, lens inspection, interferometric measurement, fiber coupling, optical component scanning, and photonic device assembly and alignment.
Laser Processing and Micro and Nanofabrication
Used in laser cutting, laser marking, micromachining, precision exposure, and other processing systems that require stable scanning velocity.
Display Panel and Electronics Inspection
Used for scanning, inspection, and positioning of glass substrates, display panels, PCBs, and precision electronic components.
Automated Assembly
Used in high precision dispensing,placement,alignment,pick-and-place,assembly and in-line inspection equipment.
Air-bearing platforms are well established in metrology, semiconductor processing, optical alignment, wafer handling, and precision scanning. Their key value lies in smooth motion, low friction, velocity stability, and precise control of geometric performance.
Build a Stable Ceramic Reference for Your Precision Motion System
Please provide the platform dimensions, travel, load, accuracy requirements, and drawings. INNOVACERA can assist in evaluating customized solutions for alumina ceramic guideways, precision datum components, and multi-axis air-bearing platforms.
Declaration: This is an original article of INNOVACERA®. Please indicate the source link when reprinting: https://www.innovacera.com/product/ceramic-air-bearing-multi-axis-motion-platform
Frequently Asked Questions
Why choose high-purity alumina for air-bearing guideways? How does it improve scanning and metrology performance?
High-purity alumina ceramic offers exceptional dimensional stability, high stiffness-to-weight ratio, low thermal expansion, and superior wear resistance. When combined with aerostatic air bearings, the uniform air film eliminates mechanical contact, friction, and low-speed stick-slip. This enables sub-micron geometric accuracy (flatness, parallelism, and perpendicularity ≤ 2 μm) and frictionless velocity stability, making it ideal for ultra-precision metrology, optical scanning, and semiconductor wafer inspection.
Can I get a custom multi-axis ceramic air-bearing platform? What specifications should be provided to the manufacturer?
Yes, as a specialized manufacturer, INNOVACERA provides tailored ceramic air-bearing solutions. Customers can customize travel stroke, platform dimensions (e.g., 600, 800, 1200 series), axis configurations (X/Y/Z/θ), mounting hole patterns, and pneumatic/drive interfaces. To request a technical evaluation and price quotation, please provide your target payload, motion travel, positioning accuracy requirements, and CAD drawings.
