Key Design Advantages
– Grounded shielding structure:
The high voltage coaxial shielding design helps reduce discharge risk and electromagnetic interference, making it suitable for precision processing and testing equipment.
– Embedded structure with welded installation:
The feedthrough can be directly welded onto the vacuum chamber wall, providing excellent hermetic sealing performance and making it suitable for high vacuum and ultra high vacuum environments.
– 304 stainless steel with ceramic to metal hermetic sealing:
The combination of 304 stainless steel and ceramic to metal sealing provides excellent temperature resistance,corrosion resistance and vacuum tightness,meeting the demanding requirements of precision manufacturing.
– Plug free design:
The plug free configuration supports on site wiring and welded connection. It is commonly used for permanent equipment assembly and is well suited for customized integration in mass-production equipment.
Typical Applications
1.Semiconductor PVD, CVD, etching, and ion implantation equipment
2.Vacuum coating and surface treatment systems
3.SEM, mass spectrometers, XPS, and other precision analytical instruments
4.Ion beam, electron beam, and high-voltage research platforms
5.Vacuum sintering furnaces, brazing furnaces, and sealed pressure vessels
6.Laboratory UHV chambers and thermal vacuum test systems
Product Specifications:
| Product Specifications | Value |
|---|---|
| Number of Conductors | 1 |
| Style | MHV |
| Shield | Grounded |
| Single/Double Ended | Single |
| Voltage | 5,000 Volts DC / 5 kV DC |
| Current | 3.6 Amps |
| Mount Style | Weld |
| Pressure Maximum | 1400 PSIG @ 20°C |
| Temperature Range Without Plug | -269°C to 450°C |
| Temperature Range With Plug | -65°C to 165°C |
| Plug | Available |
| Impedance | Not Matched |
Why Use a Shielded High Voltage Vacuum Feedthrough?
High voltage transmission inside a vacuum chamber is not only a power connection issue. It also involves electric field stability, insulation reliability, leakage control and vacuum sealing performance.
Compared with ordinary electrical connectors, this shielded high voltage vacuum feedthrough with ceramic to metal sealing is specifically engineered for vacuum chamber wall penetration. The grounded shielding design helps suppress unwanted electric field distribution, while the ceramic to metal hermetic seal ensures strong insulation and vacuum tight performance.This makes it suitable for semiconductor equipment, precision instruments and high voltage vacuum systems where process stability and safety are critical.
Looking for a shielded high voltage vacuum feedthrough?
Tell us your voltage, current,mounting method and vacuum level.Innovacera can help review the feedthrough structure and provide a ceramic to metal sealed design for your vacuum chamber.
Declaration: This is an original article of INNOVACERA®. Please indicate the source link when reprinting: https://www.innovacera.com/product/shielded-vacuum-feedthrough.
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