A pyrolytic boron nitride (PBN) plate is a specialized and high-performance ceramic component used in various high-temperature and vacuum applications. PBN plates are typically produced using a chemical vapor deposition (CVD) process, which results in a highly uniform and dense structure.
PBN has a very low CTE, meaning it does not expand or contract significantly with changes in temperature. This property is essential for maintaining dimensional stability at high temperatures.
PBN plates are widely used in the semiconductor industry for wafer processing and as components in chemical vapor deposition (CVD) equipment. They provide excellent thermal uniformity and electrical insulation.
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