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Small HV Feedthrough

  • Small HV Feedthrough
  • Small HV Feedthrough
  • Small HV Feedthrough
  • Small HV Feedthrough

INOVACERA’s small high-voltage feedthrough is an electrical penetration device specifically designed for high-vacuum environments, primarily used to safely and hermetically transmit high-voltage power or high-voltage electrical signals from the atmospheric side into the interior of a vacuum chamber while maintaining system vacuum integrity and insulation performance. Our feedthroughs utilize 95% alumina ceramic as the insulator, combined with high-performance metal materials such as 304 stainless steel, oxygen-free copper (OFC), and Kovar alloy, ensuring long-term stability under demanding process conditions.

Small HV Feedthrough

Small HV Feedthrough is widely used in excimer laser systems, providing a reliable high-voltage feeding solution for the discharge cavity of the laser. Excimer lasers, as important equipment in modern high-end manufacturing, play a significant role in semiconductor lithography, display panel annealing, automotive manufacturing, and optical fiber communication, among others.

Applications of excimer lasers

The excimer laser is widely applied due to its “cold processing” and high precision features:
Semiconductor and optoelectronics industry
Semiconductor lithography, wafer processing, optical component manufacturing, fiber grating writing
Display panel
Low-temperature polycrystalline silicon (LTPS) annealing, flexible screen peeling
Automobile manufacturing
Surface treatment of engine cylinders, weakening of airbags
New energy and research
Photovoltaic cell manufacturing, material surface modification, research experiments

Product structure and materials

Component Material Property
Insulator 95% Alumina ceramic High insulation strength, high temperature resistance, low gas emission rate
Conductor/Pin Kovar alloy / OFC copper Good thermal expansion compatibility and excellent electrical conductivity performance
Shell / Flange 304 stainless steel / kovar alloy Corrosion-resistant, weldable, vacuum-sealed

Technical specification parameters

parameter typical value
insulating material 95% Al₂O₃ ceramics
metal parts 304 stainless steel/Kovar alloy/oxygen-free copper
Pressure resistance range 1kV – 30kV (Higher voltages can be customized)
operating temperature -40°C ~ +300°C

（It can be customized according to the structure）
leak rate He Leak Rate ≤1×10⁻¹⁰ Pa·m³/s
insulation resistance ＞10¹² Ω
flange connector CF / KF / customized

Declaration: This is an original article of INNOVACERA®. Please indicate the source link when reprinting: https://www.innovacera.com/product/small-hv-feedthrough.

FAQ

INOVACERA’s small high-voltage (HV) feedthroughs utilize 95% alumina ceramic as the primary insulator to provide high dielectric strength and temperature resistance up to 300°C. The metallic components consist of corrosion-resistant 304 stainless steel, highly conductive oxygen-free copper (OFC), and Kovar alloy which matches the thermal expansion coefficient of the ceramic. By precision-brazing these materials, the feedthrough achieves an ultra-low helium leak rate of ≤1×10⁻¹⁰ Pa·m³/s, maintaining stable hermetic insulation under demanding high-vacuum environments.

These feedthroughs are widely integrated into high-vacuum systems, most notably within the discharge cavities of excimer laser systems. Excimer lasers are essential in high-end manufacturing for applications like semiconductor lithography, display panel LTPS annealing, and optical fiber grating. The small HV feedthrough is critical because it safely and hermetically transmits high-voltage electrical power (ranging from 1kV to 30kV) from the atmospheric side into the vacuum chamber, preventing electrical breakdown while protecting the integrity of the vacuum system.

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