Aluminum nitride (AlN) Substrates

Features

• High thermal conductivity
• Thermal expansion coefficient close to silicon wafer
• High breakdown voltage

Application

• High power IGBT power module
• High-power LED
• High power heat sink

Material Properties Table

Project		Test conditions	Unit	AlN
				AN-170	AN-200	AN-230
Material		–	–	AlN	AlN	AlN
Appearance		–	–	Light blue	beige	beige
Surface roughness		Ra	μm	0.2~0.75	0.2~0.75	0.2~0.75
Density		–	g/cm 3	≥3.3
Physical properties	Bending strength	3 -point bending resistance	MPa	≥400	≥350	≥300
	Vickers hardness	Load 4.9	GPa	≥10
	Water absorption	–	%	–
Thermal performance	Thermal conductivity	25℃	W/(m·k)	≥170	≥200	≥230
	Linear thermal expansion coefficient	25-500℃	x10 -6 mm/℃	4~6
	Thermal shock resistance	800℃	Time	≥10
	Specific heat	–	J/(kg·K)	720
Electrical properties	Dielectric constant	1MHz/25℃	–	8~9
	Dielectric loss	1MHz/25℃	x10 -4	≤3
	Volume resistivity	25℃	Ω·cm	> 10 14
	Breakdown voltage	–	kV/mm	> 17
Light performance	Reflectivity	Reflectivity meter	–	–
	Whiteness	Whiteness meter	–	–

Specifications and Dimensions

Size(mm) Thickness ( mm )	0.25	0.38	0.5	0.635	0.76	1.0	1.2	1.5	2.0
101.6*101.6	√	√	√	√	√	√	√	√	√
114.3*114.3	√	√	√	√	√	√	√	√	√
120*120	√	√	√	√	√	√	√	√	√
138*190			√	√	√	√	√	√	√

 

Processing

• Laser processing

• Grinding and polishing sheet roughness table

Project		Qualified		Special Grade
Internal dimension tolerance		±0.05mm		±0.03mm
External dimension tolerance		±0.15mm		±0.1mm
Hole tolerance (φ0.07-0.15mm)		±0.05mm		±0.02mm
Hole tolerance (φ ＞ 0.15mm)		±0.1mm		±0.02mm
Project	Surface roughness (μm )
	Qualified		Special Grade
Grinding	0.3-0.6		0.3-0.5
Fine grinding	0.1-0.4		0.1-0.3
Polishing	≤0.1		≤0.05