Vacuum Chuck Table

Introduction: Porous ceramics are ceramic materials with fine pore structure. They are widely used in various fields due to their high porosity, high air permeability, high thermal stability and high …

Characteristics of porous ceramic vacuum chuck1). Ceramic Material: SiC, Al2O3; Base material: stainless steel/aluminum alloy, ceramic, marble2). Porous Ceramic Porosity: 40%3). Porous Ceramic Pore Si…