technical ceramic solutions

BN Insulators for PVD, CVD Systems

Boron Nitride Plate For PVD CVD and Plasma Systems

With properties of high dielectric strength and high chemical inertness, Boron Nitride is uniquely qualified for a variety of shielding and insulating components in a harsh and high-temperature environment, such as PVD, CVD and plasma.

Boron Nitride parts such as insulating rails, protective tubes, target frames, shields and liners ensure that the PVD arc remains constrained towards the target, preventing equipment damage. Boron Nitride is commonly used as an alternative for pyrolytic Boron Nitride in these applications.