Aluminum Nitride Ceramic Heater Cover Plates

Innovacera's aluminum nitride (AlN) heater cover plates combine high thermal conductivity with electrical insulation for uniform heating in semiconductor wafer processing. Used as susceptors or heaters in CVD, PECVD, and etch equipment, these plates provide rapid thermal response and temperature uniformity. The hot-pressed AlN material offers high purity and strength. Innovacera can integrate resistive heating elements or bond them to metal flanges for complete assemblies.