Alumina ceramics are one of the strongest ceramics available. Alumina ceramics have excellent properties, making them one of the most widely used ceramics in structural, abrasive, and corrosive environments. In addition, high-purity alumina ceramics have excellent electrical properties and are one of the materials of choice for semiconductor chamber applications.
Widely used in chamber parts in semiconductor equipment, Wafer transfer parts, FPD manufacturing equipment parts, and Heat-resistant and electrically insulating parts
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