Semiconductor

Ceramic Micropore Chuck Table adopts microporous ceramic material by special technology, which has uniform pore size distribution, and internal interconnection. After grinding, the surface is smooth and delicate and has good flatness. It is widely u…

Aluminum Nitride Ceramic (AlN) is a special ceramic material that combines high thermal conductivity with high electrical resistivity. Only a few ceramics possess high thermal conductivity: Such as Beryllium Oxide (BeO) and cubic Boron Nitride (c…

Ceramic Micropore Chuck adopts microporous ceramic material by special technology, which has uniform pore size distribution, and internal interconnection. After grinding, the surface is smooth and delicate and has good flatness. It is widely …

Pyrolytic Boron Nitride (PBN) is a kind of advanced ceramic, Pyrolytic Boron Nitride (PBN) Disc and other pyrolytic boron nitride products are synthesized on the mold by chemical vapor deposition (CVD) process, with BCl3 and NH3 at high temperatu…

INNOVACERA ESD (Electro-Static Discharge) safe microporous ceramic vacuum chuck (black and dark brown) can be customized to provide high-performance suction and clamping for automated processing of film materials or visual inspection. It can meet…

Pyrolytic Boron Nitride is also called PBN. It also has a hexagonal crystal structure like hot-pressed boron nitride ceramic but is produced in different manufacturing processes. PBN is produced by chemical vapor deposition (CVD), no need to go t…

Technical Ceramic Components are integral to semiconductor manufacturing equipment, technical ceramic components are high in purity with low levels of trace metals, this means they can constitute either the process chamber material or interior proces…

Outstanding features of Boron Nitride Good thermal expansion coefficient and excellent thermal shock resistance. The thermal conductivity is 10 times that of quartz, which can reduce the risk of cracking due to rapid temperature changes. So the…

PBN-PG-Heater-Element High purity and high-performance pyrolytic boron nitride are used as the substrate for the PBN heating element. Pyrolytic graphite (PG) is placed on the surface of PBN plates by the CVD method as a conductor and heater. A…

Our Pyrolytic Boron Nitride (PBN) is processed by Chemical Vapor Deposition (CVD). Performance PBN is the ideal choice for furnace, electrical, microwave, and semiconductor components. Molecular beam epitaxy (MBE) is one of the most important ep…