INNOVACERA

technical ceramic solutions

ESD (Electro-Static Discharge) safe microporous ceramic vacuum Chuck

ESD (Electro Static Discharge) safe microporous ceramic plates

INNOVACERA ESD (Electro-Static Discharge) safe microporous ceramic vacuum chuck (black and dark brown) can be customized to provide high-performance suction and clamping for automated processing of film materials or visual inspection. It can meet the requirements of semiconductor lithography technology and flat display OLED cutting.

The advantages of anti-static microporous ceramic vacuum chuck:

  • They can realize full-area precise adsorption and clamp under a high vacuum atmosphere; little pollution and no damage to wafers;
  • The adsorption force is uniform, and there will be no local force during adsorption so that the wafer will not be warped and deformed, and the adsorption force will continue to be stable, which can ensure the processing accuracy of the wafer;
  • They are widely used in semiconductor lithography and other processes;
  • They can absorb conductors, semiconductors, and insulators such as metal foils, wafers, glass, resin films, etc.
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