As an advanced semiconductor manufacturing equipment, ion implanters have very high requirements for the performance of materials.As an important component, ceramic accessories play a vital role in io…
INNOVACERA
Vacuum Chuck
Semiconductor chips are ubiquitous in modern technology. They are essential in the evolution of various electronic devices and systems, including smartphones, smartwatches, computers, automobiles, big…
Characteristics of porous ceramic vacuum chuck1). Ceramic Material: SiC, Al2O3; Base material: stainless steel/aluminum alloy, ceramic, marble2). Porous Ceramic Porosity: 40%3). Porous Ceramic Pore Si…
Ceramic Micropore Chuck adopts microporous ceramic material by special technology, which has uniform pore size distribution, and internal interconnection. After grinding, the surface is smooth and del…
INNOVACERA ESD (Electro-Static Discharge) safe microporous ceramic vacuum chuck (black and dark brown) can be customized to provide high-performance suction and clamping for automated processing of fi…
Technical Ceramic Components are integral to semiconductor manufacturing equipment, technical ceramic components are high in purity with low levels of trace metals, this means they can constitute eith…
Vacuum chucks are used in the thinning, dicing, cleaning, handling, and other processes of semiconductor electronic chips, like wafers. Why choose microporous ceramic vacuum chucks?1. During the polis…