Vacuum Chuck

Characteristics of porous ceramic vacuum chuck 1). Ceramic Material: SiC, Al2O3; Base material: stainless steel/aluminum alloy, ceramic, marble 2). Porous Ceramic Porosity: 40% 3). Porous Ceramic Pore Size: 1-100μm 4). Size customizat…

Ceramic Micropore Chuck adopts microporous ceramic material by special technology, which has uniform pore size distribution, and internal interconnection. After grinding, the surface is smooth and delicate and has good flatness. It is widely …

INNOVACERA ESD (Electro-Static Discharge) safe microporous ceramic vacuum chuck (black and dark brown) can be customized to provide high-performance suction and clamping for automated processing of film materials or visual inspection. It can meet…

Technical Ceramic Components are integral to semiconductor manufacturing equipment, technical ceramic components are high in purity with low levels of trace metals, this means they can constitute either the process chamber material or interior proces…

Vacuum chucks are used in the thinning, dicing, cleaning, handling, and other processes of semiconductor electronic chips, like wafers. Why choose microporous ceramic vacuum chucks? 1. During the polishing and cleaning process of wafers, polis…