technical ceramic solutions

Why use Microporous Ceramic for Vacuum Chucks

Microporous Ceramic Vacuum Chuck

Vacuum chucks are used in the thinning, dicing, cleaning, handling, and other processes of semiconductor electronic chips, like wafers. Why choose microporous ceramic vacuum chucks?

1. During the polishing and cleaning process of wafers, polishing liquid and water mist enter the working table, causing corrosion. And the microporous ceramic vacuum chucks resist corrosion.

2. The microporous ceramic vacuum chuck has no environmental pollution such as light, heat, and electromagnetic, unlike the rubber or other materials vacuum chuck. And the rubber or other materials vacuum chuck will be in direct contact with the surface of the item, so it is very easy to wear.

Therefore, the porous ceramic has high temperature resistance and chemical corrosion resistance, light structure, and electrical insulation. So it is the best choice for vacuum chuck.

3. With its special porous structure, the microporous ceramic has very small holes and can be machined to very precise flatness. Combined with the special air channel design, when a certain negative pressure is given, the wafer can be smoothly and stably adsorbed on the vacuum chuck, so as to avoid wafers that will cause scratches and dents on the surface.
Through the coordination of the focus point and suction force of the vacuum suction cup, wafers of different sizes can be adsorbed on the same ceramic surface.

4. The microporous ceramic vacuum chuck can be reused after regrinding, thereby improving the utilization rate of materials.

Inspection Video:

Related Products

  • BMA Boron Nitride Atomization Nozzles

    BMA Boron Nitride Atomization Nozzles

    Innovacera's BMA boron nitride composite nozzles deliver superior precision and reliability in molten metal atomization, so Innovacera BMA boron nitride nozzles is precision atomization for molten met…

  • Petroleum pressure-bearing connector

    Petroleum pressure-bearing connector

    Petroleum pressure-bearing connectors mainly rely on glass/ceramic-metal sealing technology to achieve high telecommunication transmission and pressure-bearing performance under high temperature and h…

  • Micro Rectangular Connector

    Micro Rectangular Connector

    The rectangular sealed connector seals the metal shell and the contact piece through high-performance glass materials. This series of connectors realizes the circuit connection between the cables of e…

Enquiry