Alumina ceramic base structural part properties:
| Item | Test Condition | Unit&Symbol | 95% Al2O3 | 99% Al2O3 | 99.7% Al2O3 |
| The main chemical ingredient | Al2O3 | Al2O3 | Al2O3 | ||
| Bulk Density | g/cm3 | 3.6 | 3.89 | 3.96 | |
| Maximum Use Temperature | 1450°C | 1600°C | 1650°C | ||
| Water absorption | % | 0 | 0 | 0 | |
| ROHS Hardness | ≥85 | ≥89 | ≥89 | ||
| Flexural strength | 20° C | MPa (psi x 103) | 358 (52) | 550 | 550 |
| Compressive Strength | 20° C | MPa (psi x 103) | 2068 (300) | 2600(377) | 2600(377) |
| Fracture Toughness | K(I c) | Mpa m1/2 | 4 - 5 | 5.6 | 6 |
| Coefficient of thermal expansion | 25-1000° C | 1X 10-6/°C | 7.6 | 7.9 | 8.2 |
| Coefficient of thermal conductivity | 20° C | W/m °K | 16 | 30 | 30.4 |
| Thermal Shock Resistance | Tc | °C | 250 | 200 | 200 |
| Dielectricity constant | 1MHz.25°C | 9 | 9.7 | 9.7 | |
| Dielectric strength | ac-kV/mm (ac V/mil) | 8.3 (210) | 8.7 (220) | 8.7 (220) | |
| Volume Resistivity | 100°C | ohm-cm | > 10^13 | > 10^14 | > 10^14 |
Electron generator components are crucial in semiconductor manufacturing and various high-tech applications, alumina ceramic base and nozzles are key Insulation and Shielding Components in electron generator components.
Innovacera Alumina Ceramic Parts including the Alumina Ceramic Bases have a good feedback from many semiconductor manufacturing plants. If you need any customized alumina ceramic base or other customized alumina ceramic part, welcome to contact us at sales@innovacera.com.
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Frequently Asked Questions
Looking for a semiconductor alumina ceramic base manufacturer? Why choose 99.7% Al2O3 over lower purity grades?
In semiconductor ion implanters and electron generators, lower purity ceramics risk dielectric breakdown and heavy metallic contamination. INNOVACERA manufactures alumina ceramic bases in 95%, 99%, and 99.7% purities. Our high-density 99.7% Al₂O₃ provides superior volume resistivity (>10¹⁴ ohm·cm), high dielectric strength (8.7 kV/mm), and maximum operating temperatures up to 1650°C with zero water absorption, preventing arc-over and thermal degradation during wafer processing.
Need custom alumina ceramic bases for ion implanter tooling? What precision tolerances and machining features can you deliver?
INNOVACERA supplies custom-machined alumina ceramic bases, nozzles, and shielding blocks engineered to your exact fab equipment drawings. Utilizing multi-axis CNC diamond grinding, we hold tight dimensional tolerances down to ±0.005 mm with mirror-flat finishes. We routinely fabricate complex counterbores, alignment pins, and vacuum-sealing profiles to ensure flawless integration into your vacuum process chambers.
