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Alumina Ceramic Base

Alumina Ceramic (Al₂O₃) base and nozzles are widely used in semiconductor process equipment such as implanter equipment and electron generator components due to their excellent electrical, thermal and mechanical properties. The Alumina Ceramic Base have very good electrical insulation and high thermal conductivity, these let it play a very important roles in the semiconductor industry.

Alumina Ceramic Base

Alumina ceramic base structural part properties:

Item Test Condition Unit&Symbol 95% Al2O3 99% Al2O3 99.7% Al2O3
The main chemical ingredient Al2O3 Al2O3 Al2O3
Bulk Density g/cm3 3.6 3.89 3.96
Maximum Use Temperature 1450°C 1600°C 1650°C
Water absorption % 0 0 0
ROHS Hardness ≥85 ≥89 ≥89
Flexural strength 20° C MPa (psi x 103) 358 (52) 550 550
Compressive Strength 20° C MPa (psi x 103) 2068 (300) 2600(377) 2600(377)
Fracture Toughness K(I c) Mpa m1/2 4 – 5 5.6 6
Coefficient of thermal expansion 25-1000° C 1X 10-6/°C 7.6 7.9 8.2
Coefficient of thermal conductivity 20° C W/m °K 16 30 30.4
Thermal Shock Resistance Tc °C 250 200 200
Dielectricity constant 1MHz.25°C 9 9.7 9.7
Dielectric strength ac-kV/mm (ac V/mil) 8.3 (210) 8.7 (220) 8.7 (220)
Volume Resistivity 100°C ohm-cm > 10^13 > 10^14 > 10^14

Electron generator components are crucial in semiconductor manufacturing and various high-tech applications, alumina ceramic base and nozzles are key Insulation and Shielding Components in electron generator components.

Innovacera Alumina Ceramic Parts including the Alumina Ceramic Bases have a good feedback from many semiconductor manufacturing plants. If you need any customized alumina ceramic base or other customized alumina ceramic part, welcome to contact us at sales@innovacera.com.

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