Porous Ceramic Chuck Table

Ceramic Micropore Chuck adopts microporous ceramic material by special technology, which has uniform pore size distribution, and internal interconnection. After grinding, the surface is smooth and delicate and has good flatness. It is widely …

The electrostatic microporous ceramic chuck is a key part of the deep silicon etching machine. The electrostatic adsorption technology used is an advantageous technology that replaces the traditional mechanical clamping and vacuum adsorption meth…

The dicing vacuum chuck table can be made more than 12 inches, according to customer requirements with different shape like the disc, square and irregular shape. The size of thinning vacuum chuck can be matched with 3 inch wire, 4 inch wire, 5…

Porous ceramic chuck table is a so important part in semiconductor equipment such as silicon wafer processing. Porous Ceramic Vacuum Chucks are widely used as important components of equipment in silicon wafer, semiconductor compound wafer, pi…

The ceramic chuck table is applied to the fields of silicon wafer, semiconductor compound wafer, piezoelectric ceramic, glass, LED, semiconductor package component substrate, optical component thinning, cutting, and so on. Main Application fie…