technical ceramic solutions

Ceramic Components for the Semiconductor Industry

Advanced ceramics are indispensable in semiconductor manufacturing due to their high purity, plasma resistance, thermal stability, and electrical insulation properties. Components like electrostatic chucks, heater plates, rings, and handling arms are used in etching, deposition (CVD/PVD), and lithography processes. Innovacera provides a comprehensive portfolio of custom-engineered ceramic components from materials like Alumina, AlN, and Silicon Nitride to enhance yield and performance in wafer processing.

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