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Electrical Insulation Alumina Ceramic Parts For Implanter Semiconductor Process Equipment

Alumina ceramic parts are widely used in semiconductor process equipment due to their excellent electrical insulation properties, high thermal conductivity, and mechanical strength. In semiconductor manufacturing, alumina ceramic parts are particularly important in implanter equipment.

Implanter Equipment uses in ion implantation, a critical process in semiconductor fabrication where ions are accelerated and implanted into a substrate to modify its properties.

Alumina Ceramic Parts in implanter using including insulators, wafers, and support structures, all designed to withstand high temperatures and corrosive environments typical of ion implantation processes:

Ceramic Wafer Carriers: Hold and support wafers during ion implantation.
Ceramic Insulator Rings: Prevent electrical leakage and ensure safety.
All kinds of Feedthroughs: Provide pathways for electrical signals while maintaining vacuum integrity.

Alumina Ceramic Parts Advantages:

High Electrical Insulation
Preventing electrical leakage and ensuring safety in semiconductor processes
Good Thermal Conductivity
Preventing overheating of semiconductor components
Excellent Mechanical Strength
Resistant to wear and abrasion
Ensuring longevity and durability in demanding semiconductor environments
Chemical stability and resistance to corrosion.
Can be Machined to super high precision tolerances
Ensuring precise and reliable performance in semiconductor applications
Non-reactive with other materials used in semiconductor processes

99.5% Alumina Ceramic Parts Properties:

Alumina Ceramic Material Properties
Properties	Value
Main Composition	Al2O3>99.5%
Density	>3.95
Hardness (Gpa)	15~16
Room Temperature Electric Resistivity (Ω·cm)	>10 ¹⁴
Max Using Temperature(℃）	900.00
Three-Point Bending Strength (MPA)	450.00
Compressive Strength (MPA)	45.00
Young modulus (Gpa)	300-380
Thermal Expansion Coefficient(20-1000℃)(10-6/K)	6~8
Thermal Conductivity (W/m·k)	30.00
Dielectric strength(kv/mm)	18.00
Dielectric constant	9~10
Dielectric loss angle (*10-4)	2.00
Surface Roughness	<Ra0.05um
Remark: The value is just for review, different using conditions will have a little difference.

The use of alumina ceramic parts in semiconductor process equipment, especially in implanters making alumina ceramic material to become an indispensable material in the semiconductor industry. Alumina implanter ceramic parts such as alumina ceramic base and alumina ceramic nozzles ensure the reliability, precision, and long service life of semiconductor manufacturing processes.

Aluminum Nitride/Boron Nitride Composite BN-AlN Ceramic Parts for Ion Source

BN-AlN Ceramic is made by sintering Boron Nitride (BN) and Aluminum Nitride (AIN) powder. It has excellent electrical insulator, thermal conductivity, high strength, resistance to thermal shock, and strong resistance to halogen gas plasma, which is offers a wide range of applications, including components for semiconductor production equipment and components that require effective heat dissipation.

The ion source is a device that creates atomic and molecular ions, which is in the vacuum chamber. Aluminum Nitride/Boron Nitride Composite has excellent electrical insulator, thermal conductivity, sealing ability to vacuum and hasn’t given off much gas. So it is plays an heat sinks and thermal transfer plate role in ion sources.

Material Advantages:

High mechanical strength.
High thermal conductivity.
Low thermal expansion.
Low dielectric loss.
Excellent electrical insulation.
High corrosion resistance–non-wetted by molten metals.
Excellent Machinabilit–BN-AlN can be machined to high-precision complex shapes.
It has excellent sealing ability to vacuum and hasn’t given off much gas.
High-frequency wave properties, allow visible infra-red light to pass through easily.

Material Properties:

Properties	Units	BAN
Main Composition	/	BN+ALN
Color	/	Greyish- Green
Density	g/cm3	2.8~2.9
Three-Point Bending Strength	MPa	90
Compressive Strength	MPa	220
Thermal Conductivity	W/m·k	85
Thermal Expansion Coefficient (20-1000℃)	10-6/K	2.8
Max Using Temperature	In Atmosphere ℃	900
	In Inactive Gas ℃	1750
	In High Vacuum ℃	1750

Applications

Heat sinks
Vacuum components
Components where low dielectric constant and dissipation factor are required
Parts and components where a low coefficient of thermal expansion is required
Electronic components where electrical insulation and heat dissipation are required
Electric propulsion discharge channels for Hall Effect Thrusters

INNOVACERA provides a series of Boron Nitride composites, we provide our customers with a lot of solutions. If you’re looking for a high heat sinks solution for your application, please get in touch with us to learn more about our full range of products and how we can help you meet your thermal management needs.

Orifice Plate Introduction- The Opening Where Ions Enter The Mass Spectrometer

The orifice plate is the opening where ions enter the mass spectrometer, which is one the of key component in the mass spectrometer.

The fuction of the orifice plate is with a voltage applied to it and to help preventing ions from clumping together.

The good orifice plate should included below factors

1.Detachable heater
It is using MCH heater which is the abbreviation of metal ceramic heaters.
It refers to a ceramic heating element in which a meta tungsten or molybdenum manganese paste is printed on a ceramic casting body and laminated by hot pressing and then co-fired at 1600°C, in a hydrogen atmosphere to co-sinter ceramic and metal.

MCH ceramic heating element is high-efficiency, environmentally friendly, and energy-saving.

MCH Heater has below advantages
Energy-saving, high thermal efficiency, unit heat power consumption is 20-30% less than PTC;

The surface is safe and non-harged, with good insulation performance, can withstand the withstand voltage test of 4500V/1S, no breakdown, and leakage current <0.5mA;

No impulse peak current; no power attenuation; rapid heating; safe, no open flame;

Good thermal uniformity, high power density, and long service life.

The most important is for heating evenly, so MCH heater perform very good in this factor.

The detachable heater design in orifice plate is very economical and practical, and when the heater fails, it can be easily replaced and used, saving the cost and time of replacement.

2.Precision size of the center hole

The important requirement is the center hole should be very small and high precision to 300-600um, depend on different requirement, the size of the center hole will be measured by a quadratic instrument before shipment.

3.With heating resistance and sensor resistance
Electrical performance test before shipment, including on-voltage test, heating resistance test, sensor resistance test, generally resistance tolerance does not exceed +/-10%.

Innovacera is providing customized design of the orifice plate also repairing for the standard model like Sciex 4000/4500/5000 etc.

INNOVACERA’s many years of experience in metallization and ceramic-to-metal sealing production enable us to provide solutions according to your requirements. Our ceramic-to-metal components and analytical instruments components ideal for use in high vacuum, High voltage, and high-pressure applications.

If you need more information, pls contact with us.

Features and Benefits of Boron Nitride Ceramic Evaporation Boat Sets

In the vast landscape of advanced materials, Boron Nitride Ceramics (BNCs) stand out as a remarkable class of compounds renowned for their exceptional thermal stability, chemical inertness, and lightweight properties. Among the myriad applications that leverage these unique characteristics, Boron Nitride Ceramic Evaporation Boat Sets have emerged as indispensable tools in high-temperature processing industries, particularly in the fields of semiconductor manufacturing, vacuum metallization, and advanced coating technologies.

The Essence of Boron Nitride Ceramics
Boron Nitride (BN), a compound of boron and nitrogen, exists in various crystalline forms, each with distinct properties. Among them, hexagonal boron nitride (h-BN) and cubic boron nitride (c-BN) are the most commonly utilized in ceramic applications. BNCs, particularly those made from pyrolytic processes, exhibit unparalleled resistance to extreme temperatures, making them ideal candidates for use in environments where conventional materials would fail.

Pyrolytic Boron Nitride Ceramics: The Elite of the BNC Family
Pyrolytic Boron Nitride (PBN) Ceramics are produced through a highly specialized process involving the decomposition of a boron-containing precursor gas under high temperature and controlled conditions. This results in a dense, highly pure ceramic with exceptional thermal shock resistance and low thermal expansion coefficients. PBNCs’ ability to withstand temperatures exceeding 2000°C without significant degradation or softening makes them the material of choice for BNC Evaporation Boat Sets.

The Role of Boron Nitride Ceramic Evaporation Boat Sets
BNC Evaporation Boat Sets are precision-engineered devices designed to efficiently and uniformly deposit thin films of metals, alloys, or other materials onto substrates in vacuum chambers. These boats are typically made from PBNCs due to their superior thermal conductivity and resistance to contamination from the evaporating material. The evaporation process relies on heating the material inside the boat to a high temperature, causing it to vaporize and condense onto the target surface, forming a uniform and high-quality coating.

Advantages of BNC Evaporation Boat Sets
High-Temperature Stability: PBNC’s ability to withstand extreme temperatures ensures uninterrupted operation, even during prolonged or intensive evaporation cycles.

Chemical Inertness: The non-reactive nature of BNCs protects the boat from corrosion or contamination by the evaporating materials, ensuring purity of the final product.

Low Thermal Expansion: PBNCs’ low coefficient of thermal expansion minimizes dimensional changes during heating and cooling cycles, preserving accuracy and precision.

Longevity: The durability of PBNCs extends the lifespan of the evaporation boat, reducing maintenance costs and downtime.

Versatility: Suitable for a wide range of materials, including metals, alloys, and even some refractory compounds, making BNC Evaporation Boat Sets ideal for diverse applications.

Boron Nitride Ceramic Evaporation Boat Sets, crafted from the pinnacle of Pyrolytic Boron Nitride (PBN) Ceramics, represent a pinnacle of innovation in high-temperature processing technologies. Their unparalleled thermal stability, chemical inertness, and longevity make them invaluable assets for industries seeking precision, efficiency, and reliability in their manufacturing processes. As the demand for advanced materials and coatings continues to grow, the role of BNC Evaporation Boat Sets will only become more prominent, driving further advancements in the field of advanced ceramics and beyond.

Advanced Ceramics in Electronics and Technology

Alumina Ceramic (Al₂O₃)

Advanced Ceramics are used in electronics and technology. It has unique properties that make it serve important insulative, sensor, resistive, capacitive, magnetic functions, and electrooptic in electrical and electronic circuitry. In this article, we will explore the applications of Advanced Ceramics in Electronics and Technology.

1. Properties of Advanced Ceramics in Electronics and Technology
Advanced Ceramics are known for their excellent electrical and thermal properties. They have high thermal conductivity, which makes them ideal for heat sinks, helping to dissipate heat from electronic components. They also have high dielectric strength, which makes them suitable for electronic components such as resistors, capacitors, and insulators.

2.Advanced ceramic materials with high electrical performance
Alumina: Alumina Ceramic (Al₂O₃) are a common ceramic material used in electronic components. It has high dielectric strength, and high thermal conductivity, and is resistant to wear and corrosion.

Aluminum Nitride: Aluminum Nitride (AIN) is used in many electronic applications due to its ability to quickly dissipate heat, which makes it a more efficient material, unlike most electrical insulating materials.

Atmospheric Pressure Sintered Aluminum Nitride, like Hot Pressed Aluminum Nitride, has excellent dielectric strength properties but is specified for use in applications with extreme temperature fluctuations.

Hot Pressed Aluminum Nitride has excellent dielectric strength and excellent thermal conductivity, making it ideal for semiconductor applications.

Silicates: Silicates are Typically used in cost-effective technical applications where electrical resistivity is required.

Mullite has excellent thermal shock properties and dielectric strength. Steatite ceramics have low dielectric losses and high dielectric strength, and are inexpensive to manufacture.

Silicon Carbide (SiC): Silicon Carbide is a ceramic material used in high-power electronic devices such as power converters, inverters, and motor drives. It has high thermal conductivity, high electron mobility, and can operate at high temperatures.

3. Advantages of Ceramics in Electronics and Technology

Ceramics have several advantages over other materials used in electronics and technology. Some of these advantages include:

1. Durability: Ceramics are highly resistant to wear and corrosion, making them ideal for use in harsh environments.

2. High Temperature Resistance: Ceramics can operate at high temperatures without degradation, making them ideal for high-temperature applications.

3. High Dielectric Strength: Ceramics have high dielectric strength, which makes them ideal for use in electronic components such as capacitors and insulators.

4.High Thermal Conductivity: Ceramics have high thermal conductivity, which makes them ideal for use in heat sinks, which help dissipate heat from electronic components.

Applications of Boron Nitride in the metallurgical industry

1. Protective Materials
During the steel smelting process, it can be used as a protective material to protect metal materials.

For example, in the continuous casting process, Boron Nitride (BN) can be used as a protective slag to effectively prevent slag inclusion defects in castings and reduce the wear of the tundish and crystallizer.

In addition, BN can also be used as a filter material for molten metal to filter out impurities and gases in the metal and improve the quality and purity of the metal.

2. Thermal materials
Due to its high thermal conductivity and good thermal stability, this material can be used as a thermal material in the metallurgical industry.

For example, in the steel smelting process, BN an be used as the main material for high-temperature equipment such as crucibles and thermocouple sleeves, and has good high-temperature oxidation resistance and high-temperature strength.

In addition, it can also be used as a lining material for high-temperature furnaces to improve the service life and safety of the furnace.

Example: crucibles, boats, liquid metal delivery pipes, rocket nozzles, high-power device bases, molten metal pipes, pump parts, cast steel molds for melting and evaporating metals, manufacturing high-temperature components, rocket combustion chamber linings, spacecraft thermal shields, and corrosion-resistant parts for magnetofluid generators.

3. Heat-insulating materials
Boron nitride has very good heat insulation properties and can be used as heat insulation material in metallurgical industry.

For example, in the continuous casting and rolling production line of iron and steel enterprises, boron nitride can be used as heat insulation materials such as heat insulation plate and heat insulation sleeve, which can effectively reduce the heat exchange between high temperature billets and air, and improve the production efficiency and product quality. In addition, boron nitride can also be used as heat insulation material for high temperature furnace to reduce heat loss and energy waste.

Examples: manufacture of high temperature components, rocket combustion chamber lining, heat shielding of spacecraft, corrosion-resistant parts of magnetic current generators

4. Processing tools
Boron nitride has great wear resistance and lubricity, and can be used as machining tools in the metallurgical industry.

For example, in metal cutting processing, BN can be used as a tool coating material to improve the wear resistance and service life of the tool.

In addition, BN can also be used as abrasives, abrasives and other processing aids to improve processing efficiency and surface finish.

The feacure of Cearmic Reflector

Ceramic reflector is designed to reflect and direct light efficiently with various applications. Compared with traditional reflectors made by metals like aluminum, our ceramic reflectors are crafted by advanced ceramic materials 99 Alumina ceramic which has several advantages:

1.Optical Properties: Alumina has high reflectivity in certain wavelengths. It can control diffusion of light more precise and control over light distribution and efficiency, which makes ceramic reflectors suitable for optical systems, specialized lighting applications, and scientific instruments.

2.Thermal Stability: compared with metals, Al2O3 has higher thermal stability which can withstand much higher temperature without deforming or losing their reflective properties. It makes ceramic reflectors an ideal component where heat resistance is crucial, such as in industrial furnaces, high-intensity lighting and automotive headlight.

3.Electrical Insulation: 99 Alumina is an excellent electrical insulators. In applications where electrical conductivity of reflector could have safety risks, it requires to use an electrical insulation material like Alumina.

4.Corrosion Resistance: Alumina has an extreme corrosion resistance. This property makes it more durable and longer service life in environment exposed to chemical and moisture conditions.

The Alumina ceramic reflectors play an important role in industries where requires to use heat-resistant and robust materials with excellent electrical insulation and optical properties. It can be found the application in various industries and technologies with high strength, thermal stability, and excellent electrical insulation. Some common applications of alumina ceramic reflectors include:

＊Optical Systems
＊High-Intensity Discharge Lighting
＊Infrared Heating
＊Semiconductor Manufacturing
＊Industrial Furnaces and Kilns
＊Microwave Applications
＊High-Temperature Environments

Typical Models
• BAB – the external shape is round like BAB330-130, BAB192, BAB275, BAB350.
• ZAB – the external shape is irregular like ZAB-S04-30.
• LAK – the external shape is rectangular but one side is concave like LAK311.
• EAB – the external shape is rectangular;
• GAZ – the external shape is triangular;
• Description of part number: CRDP-XX-YY-Z-AAA-BBB

Innovacera Ceramic laser reflectors are high reflectance cavities used in solid state and CO2 laser systems. Our range of custom ceramic reflectors offer significant advantages and improvements over those made with materials such as metal and polymer, it work particularly well in Ruby and Nd: YAG laser pumping chambers and used extensively for long-life laser reflectors.

The use of ceramic reflectors represents a significant advancement. Their ability to withstand high temperatures, resist corrosion, and maintain reflective efficiency makes them invaluable in applications ranging from optical systems to semiconductor industry. Moreover ceramic reflectors contribute to sustainability by improving energy efficiency and reducing maintenance costs over the long term.

High Temperature Magnesia Stabilized Zirconia

INNOVACERA presented new material High temperature Magnesia Zirconia which is also called Magnesium Stabilized Zirconia Ceramic. It is a great refractory and insulating material due to high oxygen ion conductivity, high strength and toughness, and good themal shock resistance. it has a clean melt at temperatures above 1900’C and above and is specially manufactured for melting superalloys and precious metals. its superior thermal shock resistance to temperatures reaching up to 2200℃.

The Magnesia Stabilized Zirconia is with porosity 1-18%, so it’s different from normal MgO-ZrO2. This material is often used as sizing nozzles in continuous casting,ladle slide plate, setter plate in metal powder industry, gas atomizing nozzle.

Sizing nozzle for molten steel
The sizing nozzle made of Magnesia Zirconia is with very high properties including high mechanical strength, very good thermal shock resistance, good corrosion resistance, erosion resistance and low thermal expansion.

The sizing nozzles are installed at the bottom of the continous casting tundish. The molten steel will flow into a mold through the sizing nozzles. The diameter of the nozzle can be changed by customers’ requirement.

MSZ plate for Ladle Skateboard
The Magnesia Zirconia plate is often used to inlaid with ladle slide which is also working in continuous casting of high oxygen steel, high calcium steel, high manganese steel and other steels. The Zirconia (ZrO2) plate is with high corrosion resistancce and low expansion. Then it will increase the woking life of the stateboard, reduce the cost. The dimension can also be customized.

Magnesia Stabilized Zirconia Setter Plate
Due to MSZ with good chemical resistance , high temperature resistance and no chemical reaction with fired ceramic parts, it’s widely work as setter plate ceramic capacitors, sensitive parts, magnetic materials and other electronic components.
Max working Temperature: 2600℃
Working Environment: Atmospheric Environment, Vacuum, Atmospheric Reduction

Gas Atomizing Nozzle for Metal Powder Industry
MSZ nozzle is an ideal choice for almost all common metal and alloy powders. The working temperature is 2200℃ max in air, vacuum or gas protection environment.

Introduction of Mass Spectrometer Filament

INNOVACERA is glad to offer new standard filament assemblies, a critical component in mass spectrometry applications for the analytical and medical industries.

Principle of mass spectrometer filament

Mass spectrometer filament is also called ion source filament or cathode filament. It is mainly made of high melting point metals such as tungsten (W) alloy or molybdenum alloy. Its function is similar to that of ordinary filaments. It mainly produces electron emission under high pressure and excites gaseous molecules into ions, thereby generating the charge-to-mass ratio signal required for mass spectrometry.

These filament supports are manufactured using 96% alumina, selected for its good electrical insulation and high temperature stability. Customers can choose between two and four-pin options, with the pins brazed into the alumina insulator ready for filament welding. Our brazing process makes the filament considerably more resistant to higher temperatures, around 700°C compared with standard adhesives, which can only typically withstand up to 350°C.

The function of the mass spectrometer filament

In a mass spectrometer, the mass spectrometer filament is the main part of the ion source. Its role is to excite gaseous molecules into ions, and then screen and measure the charge-to-mass ratio. It is one of the core components of the mass spectrometer for mass spectrometry analysis.

The working principle of the mass spectrometer filament mainly involves the emission of electrons after being heated in a vacuum. These electrons are accelerated through the ionization chamber under the action of the electric field, and lose energy after colliding with gas molecules, which eventually leads to the ionization of gas molecules to form positive ions. This process is the basis of the work of the ion source in mass spectrometry analysis.

Type of Electron beam emitter

TungstenFilament
LaB6 cathode
TFE(Thermal Field Emitter)
Code Cathode

Below is the detail properties.

Electron Source	Tungsten Filament	LaB6 Cathode	TFE	Cold Cathode
Luminance(A/cm²./sr)	-10⁵	-10⁶	-10⁸	-10⁹
Capacity range(eV)	1-3	1-2	0.6	0.3
working pressure(Pa)	＜10^-3	＜10^-5	＜10^-7	＜10^-8
Working temperature(K)	-2700	-1800	1700-1800	Room temp
Lifetime(time)	40-100	200-1000	＞5000	＞10000

Many years of manufacturing experience with ceramic-to-metal assemblies means we can work closely with customers to tailor designs to their requirements or produce constant runs of standard designs ensuring quick turnaround and delivery.

If you need customized filament, pls contact with us.

Hot-Pressed Aluminum Nitride Heater Cover Introduction

Hot-pressed aluminum nitride ceramics are sintered using vacuum hot pressing, a process more challenging than normal pressure sintering. The purity of aluminum nitride can reach 98.5% (without any sintering additives), and the density after hot pressing reaches 3.3 g/cm3. Additionally, it exhibits excellent thermal conductivity and high electrical insulation, ranging from 90 W/(m·K) to 210 W/(m·K).

The material is hard and brittle, making it difficult to process. Consequently, it is prone to nicks or scratches during handling or processing, leading to a high scrap rate.

The thinnest thickness is only 0.75 mm, and the processing difficulty is also relatively high.

Applications of hot-pressed aluminum nitride heater covers:

– Semiconductor Cover Heater

– Cover and MRI equipment (magnetic resonance imaging)

– High-power detectors – Plasma generators – Military radios

– Electrostatic chucks and heating plates are used for semiconductors and integrated circuits.

– Infrared and microwave window materials

Material Properties

1. Uniform microstructure

2. High thermal conductivity (70-180 W/(m·K)), customized through processing conditions and additives

3. High resistivity

4. Thermal expansion coefficient is close to that of silicon

5. Corrosion and erosion resistance

6. Excellent thermal shock resistance

7. The material exhibits chemical stability up to 980°C in H2 and CO2 atmospheres, and up to 1380°C in air (surface oxidation occurs at around 780°C; the surface layer protects the bulk material up to 1380°C).

Typical specifications:

Purity:	>98.5%
Density:	>3.3 g/cm3
Compressive strength:	>3,350MPa
Flexural strength:	380MPa
MGray and gray-black:	>90W/(m·K)
Coefficient of thermal expansion:	5.0 x 10-6/K
Max. temperature::	1,800°C
Volume resistivity:	7×1012Ω·A copper-oxygen eutectic form that successfully bonds with copper and oxides used as substrates
Dielectric strength:	15 kV/mm

Aluminum Nitride (AlN) is an excellent material when high thermal conductivity and electrical insulation properties are required, making it ideal for thermal management and electrical applications. Additionally, AlN is a common replacement for Beryllium Oxide (Be) in the semiconductor industry because it does not pose a health hazard when processed. The thermal expansion coefficient and electrical insulation properties of AlN closely match those of silicon wafer materials, making it a useful material for electronic applications where high temperatures and heat dissipation are often an issue.

AlN is one of the few materials that offer both electrical insulation and high thermal conductivity. This makes AlN very useful in high-power electronic applications as a heat sink and heat spreader.