What is Boron Nitride?
Hexagonal boron nitride (h-BN) ceramic has a microstructure similar to graphite. It is manufactured by hot pressing boron nitride powders at temperatures up to 2000 °C and high pressure. The maximum blank size is 500 × 500 × 200 mm, and it can be further machined into complex shapes.
Why Can Boron Nitride Ceramics Be Used in Ion Implanters?
Ion implantation is a key process in semiconductor manufacturing, where wafers are doped with foreign atoms to modify material properties such as conductivity and crystal structure.
The high-current extraction electrode is the core of an ion implanter system. It must withstand temperatures up to 1400 °C, strong electromagnetic fields, aggressive process gases, and high mechanical forces.
Therefore, components made from boron nitride insulator ceramics help ensure that this process remains efficient, precise, and free of impurities.
The unique combination of exceptional thermal, physical, and chemical characteristics of INNOVACERA’s Boron Nitride ceramics makes them ideal for addressing critical challenges in insulator applications.
Boron Nitride Material Advantages
Non-Wetting
High Electrical Resistivity
High Thermal Conductivity
Excellent Machinability
Good Chemical Inertness
High-Temperature Resistance
High Dielectric Breakdown Strength
Excellent Thermal Shock Resistance
Excellent Lubricating Properties (Low Coefficient of Friction)
INNOVACERA Boron Nitride Ceramics Grades
Learn more about our binder-bonded grades HB, with over 90% BN, our highest purity (>99.7% BN) grade UHB, and our composite grades BMS, BMA, BSC, BMZ, BAN and BSN.
| Properties | Unit | UHB | HB | BC | BMS | BMA | BSC | BMZ | BAN | BSN |
| Main Composition | – | BN>99.7% | BN>99% | BN>97.5% | BN+SiO2 | BN+Al2O3 | BN+SiC | BN+ZrO2 | BN+AlN | BN+Si3N4 |
| Color | – | White | White | White | White Graphite | White Graphite | Greyish-Green | White Graphite | Greyish-Green | Gray Black |
| Density | g/cm3 | 1.6 | 2 | 2.0~2.1 | 2.2~2.3 | 2.25~2.35 | 2.4~2.5 | 2.8~2.9 | 2.8~2.9 | 2.2~2.3 |
| Three-Point Bending Strength | MPa | 18 | 35 | 35 | 65 | 65 | 80 | 90 | 90 | / |
| Compressive Strength | MPa | 45 | 85 | 70 | 145 | 145 | 175 | 220 | 220 | 400~500 |
| Thermal Conductivity | W/(m·k) | 35 | 40 | 32 | 35 | 35 | 45 | 30 | 85 | 20~22 |
| Thermal Expansion Coefficient (20~1000°C) | 10-6/K | 1.5 | 1.8 | 1.6 | 2 | 2 | 2.8 | 3.5 | 2.8 | / |
| Max Using Temperature
In Atmosphere In Inactive Gas In High Vacuum (Long Time) |
°C | 900
2100 1800 |
900
2100 1800 |
900
2100 1900 |
900
1750 1750 |
900
1750 1750 |
900
1800 1800 |
900
1800 1800 |
900
1750 1750 |
900
1750 1700 |
| Room Temperature Electric Resistivity | Ω·cm | >1014 | >1014 | >1013 | >1013 | >1013 | >1012 | >1012 | >1013 | / |
| Typical Application | – | Nitrides Sintering | High Temperature Furance | High Temperature Furance | Powder Metallurgy | Powder Metallurgy | Powder Metallurgy | Metal Casting | Powder Metallurgy | Metal Casting |
Packaging of Boron Nitride Components
Given its fragile nature, boron nitride is typically vacuum-sealed in plastic bags, cushioned with thick foam, and packed in cartons to prevent damage during transportation. Special packaging arrangements can be provided upon request.
Contact INNOVACERA
INNOVACERA offers a wide range of boron nitride materials and solutions. If you are looking for a boron nitride insulator solution for your application, please contact us to learn more about our full product range and how we can support your needs.
Enquiry