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Zirconia (ZTA) Substrates

Innovacera’s Zirconia Toughened Alumina (ZTA) Substrates combine the superior strength of zirconia with the stability of alumina, offering excellent mechanical performance, high reflectivity, and outstanding resistance to thermal shock. With a dense white appearance and exceptional surface finish, these substrates ensure reliable operation in medium-power electronic and optical applications. Their robust toughness and precise machining capability make them an ideal choice for medium-power supply modules, LED lighting systems, and precision instruments.

Zirconia (ZTA) Substrates

Features

• High strength
• High reflectivity
• High thermal shock resistance
• Excellent processing performance

Application

• Medium power supply module
• Medium power LED
• Instruments

Material Properties Table

Project Test conditions Unit Al 2 O 3 /ZrO 2
ZTA
Material Al 2 O 3 /ZrO 2
Appearance White dense
Surface roughness Ra μm 0.2~0.5
Density g/cm 3 ≥3.85
Physical properties Bending strength 3 -point bending resistance MPa ≥550
Vickers hardness Load 4.9 GPa ≥14
Water absorption % 0
Thermal performance Thermal conductivity 25℃ W/(m·k) ≥23
Linear thermal expansion coefficient 25-500℃ 1×10 -6 mm/℃ 6.6~7.5
Thermal shock resistance 800℃ Time ≥10
Specific heat J/(kg·K) 720
Electrical properties Dielectric constant 1MHz/25℃ 10~11
Dielectric loss 1MHz/25℃ x10 -4 ≤3
Volume resistivity 25℃ Ω·cm > 10 14
Breakdown voltage KV/mm > 15
Light performance Reflectivity Reflectivity meter ≥95%
Whiteness Whiteness meter

Specifications and Dimensions

Material Unit Al 2 O 3 ZTA AlN Si 3 N 4
Effective dimensions ( A , B ) mm 50.8-190 50.8-190 50.8-190 138*190
Thickness ( T ) mm 0.25-1.5 0.25-1.5 0.25-1.0 0.25 , 0.32
Thickness tolerance mm ±5% ( Min±0.03mm ) ±5% ( Min±0.03mm ) ±5% ( Min±0.03mm ) ±5% ( Min ±0.03mm )
Warpage ( C ) mm ≤0.3% ≤0.3% ≤0.3% ≤0.3%
surface roughness μm 0.2-0.6 0.2-0.5 0.2-0.75 0.2-0.75
Size, thickness and surface roughness can be customized

 

Processing

• Laser processing

Laser processing diagram

• Grinding and polishing sheet roughness table

Grinding and polishing sheet roughness table diagram

Project Qualified Special Grade
Internal dimension tolerance ±0.05mm ±0.03mm
External dimension tolerance ±0.15mm ±0.1mm
Hole tolerance (φ0.07-0.15mm) ±0.05mm ±0.02mm
Hole tolerance (φ > 0.15mm) ±0.1mm ±0.02mm
Project Surface roughness (μm )
Qualified Special Grade
Grinding 0.3-0.6 0.3-0.5
Fine grinding 0.1-0.4 0.1-0.3
Polishing ≤0.1 ≤0.05
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