• High electrical resistivity
• High thermal conductivity
• Mirror polished surface and high precision flatness

• Acid, alkali, salt, and organic reagent resistant
• High purity
• With anisotropy in the mechanics, heat and electricity

• High thermal conductivity and uniform thermal istribution
• High plasma durability

• High insulation
• Acid, alkali, salt and organic reagent resistant 

• Acid, alkal, salt, and organic reagent resistar
• High purity
• With anisotropy in the mechanics, heat, and electricity

• High purity
• Electrical insulator
• Reduced Particulate Generation
• Controlled Electrical Properties

• Materials: Alumina / AlN / SiN
• Minimal deformation
• High thermal conductivity
• Stable insulation
• Resistance the acid and alkali corrosion resistance

• Ceramie Materials: 95%, 9gi Alumina, AN, Be0
• Excellent sealing and bond strength
• Minimal substrate deformaticn
• Universal applicability for ceramic metal joining
• Uniform coating, thickness and density

Alumina End Effector

Alumina ceramic handing arm end effectors are applicable to semiconductor and wafer equipment.Prevents static electricity and contamination when handling sensitive electronic components, ensuring their safety.

• High Hardness
• Good Wear Resistance
• Excellent Heat Resistance
• Excellent Insulation

Aluminum Nitride Wafer

Aluminum Nitride Wafer Substrates are a crucial component in the semiconductor industry, known for their exceptional thermal and electrical properties. Aluminum Nitride (AIN) materials have gained prominence due to their compatibility with silicon, making them ideal for a variety of wafer-related applications.

• High melting point
• High electrical insulation
• Low dielectric constant
• Higher mechanical strength
• Superior corrosion resistance against molten metal