Innovacera have two materials as Porous ceramics one is Aluminum Oxide and the other one is Silicon Carbide. For Aluminum oxide, the common pore size we make is 1um, 15um, 30um, 40um, 50um and 100um. Silicon carbide general pore size is 15um, 30um an…

Characteristics of porous ceramic vacuum chuck 1). Ceramic Material: SiC, Al2O3; Base material: stainless steel/aluminum alloy, ceramic, marble 2). Porous Ceramic Porosity: 40% 3). Porous Ceramic Pore Size: 1-100μm 4). Size customizat…

Ceramic Micropore Chuck Table adopts microporous ceramic material by special technology, which has uniform pore size distribution, and internal interconnection. After grinding, the surface is smooth and delicate and has good flatness. It is widely u…

Technical Ceramic Components are integral to semiconductor manufacturing equipment, technical ceramic components are high in purity with low levels of trace metals, this means they can constitute either the process chamber material or interior proces…

1. Machining guidance and precautions: The porous ceramic plate is soaked in clean tap water for 5 minutes, and then processed. So as to prevent the oil from penetrating into the dry ceramic plate and not being washed away. The porous cera…

The dicing vacuum chuck table can be made more than 12 inches, according to customer requirements with different shape like the disc, square and irregular shape. The size of thinning vacuum chuck can be matched with 3 inch wire, 4 inch wire, 5…

Ceramic Vacuum Chuck is a kind of uniform solid or vacuum body produced by using nano-powder. A large number of connected or closed ceramic materials are generated in the material through high-temperature sintering. The material is Al2O3 or SIC, w…

Porous ceramic chuck table is a so important part in semiconductor equipment such as silicon wafer processing. Porous Ceramic Vacuum Chucks are widely used as important components of equipment in silicon wafer, semiconductor compound wafer, pi…

Innovacera have more than 7 years experience in producing porous ceramic part for vacuum chuck, filters, air bearings for semiconductor and pharmaceutical industry. The range of Innovacera porous ceramic filters is made from aluminum oxide and…

The ceramic chuck table is applied to the fields of silicon wafer, semiconductor compound wafer, piezoelectric ceramic, glass, LED, semiconductor package component substrate, optical component thinning, cutting, and so on. Main Application fie…