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Applications of precision ceramics in front-end semiconductors

Semiconductor equipment requires a large number of precision ceramic components. Because of the advantages of high hardness, high elastic modulus, high wear resistance, high insulation, corrosion resistance and low expansion, it can be used as parts of silicon wafer polishing machine, epitaxy/oxidation/diffusion heat treatment equipment, photolithography machine, deposition equipment, semiconductor etching equipment, ion implanter and so on. Semiconductor ceramics are alumina, silicon nitride, aluminum nitride, silicon carbide, boron nitride, and so on, in semiconductor equipment, the value of precision ceramics about 16% .

1. Alumina (Al2O3)
Alumina (Al2O3) is the most widely used ceramic material in semiconductor equipment. It has the advantages of stable material structure, high mechanical strength, high hardness, high melting point, corrosion resistance, good chemical stability, high resistivity, and good electrical insulation. In semiconductor etching equipment, high purity Al2O3 coating or Al2O3 ceramics are mainly used as the protective materials for etching cavity and its inner parts. In addition to the cavity, the plasma equipment gas nozzle, gas distribution plate and fixed ring fixed wafer also need to use alumina ceramics. Ceramic mechanical arms made of alumina ceramics are used in the handling of silicon wafers. From the material price, processing difficulty and other economic aspects, alumina ceramic robot arm cost-effective higher.
In addition, in wafer polishing process, alumina ceramics can be widely used in polishing plate, polishing pad correction platform, vacuum sucker, etc. .
2. Aluminum nitride (ALN)
High purity aluminum nitride ceramics have excellent thermal conductivity, heat resistance, insulation, Coefficient of thermal expansion close to silicon, and excellent plasma resistance. It can be used in heater of wafer heating, electrostatic Chuck, etc..
3. Silicon nitride (Si3N4)
Silicon nitride (Si3N4) is a kind of material with high fracture toughness, high heat shock resistance, high wear resistance, high mechanical strength, and corrosion resistance. It can be used in semiconductor equipment, such as the platform, bearings, and other components.
4. Boron nitride (BN)
BN has the advantages of high resistance, high temperature resistance, high electric breakdown resistance, no pollution, corrosion resistance and easy processing. Can be used in MOCVD equipment insulation heat dissipation, PVD/CVD vacuum coating equipment insulation accessories, ion implantation machine insulation accessories.
5. Silicon carbide (SiC)
Silicon carbide is characterized by high thermal conductivity, high temperature mechanical strength, high stiffness, low Coefficient of thermal expansion, good thermal uniformity, corrosion resistance and wear resistance. Silicon carbide can maintain good strength at extreme temperatures up to 1400 ° C. Because of its high hardness and low wear, and its Coefficient of thermal expansion are almost the same as that of silicon wafers, the lapping disc using silicon carbide ceramics can be lapped and polished at high speed. During the production of silicon wafers, high temperature heat treatment is needed, and silicon carbide jigs are often used to transport them. They are heat-resistant, non-destructive, and can be coated with DLC coatings, which can enhance the performance and alleviate the damage of wafers, at the same time to prevent the spread of pollution.
In addition, silicon carbide ceramics can also be used in XY platform, pedestal, focusing ring, polishing plate, wafer Chuck, vacuum sucker, carrier arm, furnace tube, crystal boat, cantilever propeller.

What is aluminum nitride ceramics

Aluminum nitride (AIN) is known for its high thermal conductivity and excellent electrical insulation properties. It is a common ceramic material used in a variety of electrical devices. In addition to its coefficient of thermal expansion and electrical insulation capabilities, aluminum nitride ceramics are resistant to most molten metals, such as copper, lithium and aluminum.

Properties of aluminum nitride ceramics
Aluminum nitride has a variety of properties that make it suitable for a variety of industrial applications:
High thermal conductivity (above 170 W/mK). This is close to the value of BeO and SiC and more than five times that of aluminum oxide (Al2O3).
Its coefficient of thermal expansion is 4.5 *10-6°C, the same as that of silicon (3.5-4 *10-6°C).
It has good light transmission properties
It is not toxic.
Good electrical conductivity. Aluminum nitride’s electrical properties include its dielectric constant, dielectric loss, bulk resistivity and dielectric strength – all of which make it an excellent insulating material.
Good mechanical properties: Aluminum’s mechanical properties are also responsible for its widespread use in industrial processes. It has a higher flexural strength than aluminum oxide (Al2O3) and beryllium oxide (BeO) ceramics.
Wide range of aluminum nitride ceramics
Aluminum nitride ceramics are used in many applications because of their good properties, including high thermal conductivity, low dielectric constant and dielectric loss, high dielectric strength, and significant resistance to plasma erosion.
Chip heat dissipation and support
Aluminum nitride ceramic substrates (ceramic trays) in semiconductor devices
Aluminum nitride etch shielding
Aluminum nitride evaporation boats for OLEDs
Also used for packaging of various electronic components

What is PTC Heaters

Definition:
A positive temperature coefficient heating element (PTC heating element) or self-regulating heater is an electrical resistance heater whose resistance increases significantly with temperature. The name self-regulating heater comes from the tendency of such heating elements to maintain a constant temperature.
PTC heating elements are a type of thermistor.

Advantages of PTC heaters:
1.The surface temperature of PTC ceramic heater can be controlled automatically.
2.Good voltage shock resistance, the highest withstand voltage can reach more than 1300VDC, which ensures the reliability of components working under high voltage for a long time.
3.The temperature rises rapidly at low temperature, and it can start quickly even if the ambient temperature reaches -40 degrees.
4.The power aging is extremely small under high DC voltage, and it can still maintain a good heating effect after long-term use.
5.Curie temperature and PTC size can be adjusted arbitrarily according to customer requirements, ranging from 60 degrees to 315 degrees.
6. Long service life
7. Aluminum spraying, screen printing aluminum, silver, welding and other electrode layers are produced and supplied at the same time.
Applications:
1.Heating or defrosting in air conditioners, pure electric vehicles and hybrid electric vehicles, or for heating battery boxes.
2.Liquid and solid mosquito coils and incense perfumes.
3.Air heaters, bathroom heaters, coffee pots and foot baths and other small household appliances.
Innovacera offer ceramic heater solutions for customers, if you have any inquiry, pls feel free to send to us.

Big Promotion for Innovacera Ceramic Igniter

Why choose Innovacera ceramic igniter for wood pellet ignition?

It is due to below reasons:
1.High Performance: Providing fast and reliable ignition, allowing for quick start-up of wood pellet boilers or stoves. The igniters reach high temperatures rapidly, ensuring efficient ignition of the pellets.
2.Durability: Using high-quality materials and advanced manufacturing techniques to ensure the durability and longevity .
3.Resistance to Environmental Factors: We are engineered to withstand various environmental factors that can affect ignition, such as moisture, dust, and contamination from the wood pellets. This resistance contributes to the igniters’ reliability and consistent performance.
4.Energy Efficiency: It is designed to be energy-efficient, consuming low power during the ignition process. This not only helps reduce energy costs but also contributes to the overall efficiency of the wood pellet system.
5.Versatility: We are versatile and can be used in a wide range of wood pellet boilers and stoves. They are compatible with various ignition systems and can be retrofitted as replacements for existing igniters, making them a convenient choice for upgrading or repairing wood pellet heating systems.
6.Quality Manufacturing: We are known for its commitment to quality manufacturing processes. Our igniters undergo rigorous testing and quality control measures to ensure consistent performance and reliability.
7.Industry Experience: We have a wealth of experience in the field of igniter technology, for various applications, including wood pellet ignition, for many years.
August is our anniversary, in order to thank the support of new and old customers, we will give 5% discount for orders over $300, please contact our sales department for details.
The specific content is subject to the news published on our official website.

5% Discount for Innovacera Ceramic Igniter

August is coming soon! At the same time, august is Innovacera’s anniversary. In order to celebrate it and and feedback new and old customers, we will launch a promotion for igniters. Get 5% off all ceramic igniter orders throughout August.

ceramic igniter

INNOVACERA offers ceramic igniters for hot surface ignition systems in heating applications. These high strength, heat resistant ceramic igniters have become an industry standard in gas heating systems. Their superior materials and rapid heating capabilities provide reliable performance over a long useful life.
Applications include:
• Straw burner
• Other biomass burner
• Wood pellet burner
• Wood chips burner
• Other biomass burner
• And more
INNOVACERA offers two styles of ceramic igniters, white and black ceramic igniters. Both leveraging strong properties including:
• Ready assembled, easy-to-install systems
• Space-saving, noiseless and impervious to
overheating (in case the blower fails)
• Extremely long-lasting and resilient
• Minimal energy consumption
• Completely electrically insulated
• No exposed electrical contacts
• No sensitive welding points
• Long lasting (non aging)
• Time to ignition 60~90 seconds
• Available in 100V / 120V / 220V / 240VAC
Some igniter specifications are as follows:

Model	Voltage/Power	Size	Wire
INC-H1-1/2/3/4	230V	90Φ10.5φ6.5mm	300-500mm
INC-H1-1/2/3/4	210W/225W/240W/255W	90Φ10.5φ6.5mm	300-500mm
INC-H2-1/2	230V 160W/180W	90Φ10.5φ6.5mm	300-500mm
INC-H3-1	120V 230W	90Φ10.5φ6.5mm	300-500mm
INC-H4-1/2	230V 350W/300W	108Φ11.5φ6.5mm	300-500mm
INC-H5-1/2/3/	230V 150W/170W	70Φ10.5φ6.5mm	300-500mm
INC-H5-4	230V 230W	70Φ84-133φ6.5mm	300-500mm
INH-1-230	230V 270W-315W	106*11.5	–

This table is only a partial ceramic igniter specification. For more information please contact us.
In addition to regular sizes and specifications, we also accept customized. Don’t miss this discount, contact us with no hesitation!

Precautions For Installation Of Ceramic Ignite

Ceramic igniter, which is used for the ignition of biomass (especially wood pellet) burning system. It can also be adapted to other specific application (biofuel system, water boiling, industrial oven, etc).

High Temperature 26mm Alumina Ceramic Hot Surface Igniter with Flange Cap

Installation prohibition
Please design your system in order that the heating element of the heater never enters directly in contact with solid fuel or ashes or metal protective tube. If the heating element enters in contact with solid fuel, ashes or metal protective it could damage the heating element. Longer protective tube should be consider to avoid this situation.
Please make sure to let an interspace of minimum 3mm around the ceramic heating element and the tube.

Diagram-of-a-stove-using-a-pot-burner-combustion-system

Information
For use beyond typical operating conditions or applications, please consult your INNOVACERA sales representative or distributor for further information.
For more information can see on INNOVACERA web site.
About INNOVACERA
INNOVACERA was incorporated in 2012 and since then producing ignition components for gas and biomass sector. The company complies with ISO 9001 and ISO14001.

INNOVACERA Universally Applicable Ceramic Metallization

Innovacera metallizes precision ceramic for military, medical, and aerospace applications. Our metallization creates a strong and robust bond to many different ceramic bodies and has nearly universal applicability for ceramic to metal brazing.
Our ceramic metallization process uses proprietary thick film molybdenum/manganese and molybdenum/manganese/tungsten paints as the base layer on a ceramic substrate. To prevent oxidation and to improve wettability after the metallization paint is sintered into the ceramic at high temperature, it is plated using either electroless or electrolytic plating or nickel oxide paint.

Metallized Ceramic Insulators

With more than ten decades of industry experience, the Innovacera team has expertise in a variety of application methods and is capable of metallizing on flat, cylindrical, and complex ceramic bodies, from prototyping through production.
Ceramic Materials:
Aluminum Oxide (95%, 99%)
Beryllium Oxide (99%-99.5%)
Metalized Ceramic Benefits：
Strong, robust bond
Minimal substrate deformation
Universal applicability for ceramic metal joining
High processing speeds
Uniform coating, thickness, and density

Cooling in Power Electronics

Power electronics devices such as MOSFETs, GTOs, IGBTs, IGCTs etc. are now widely used to efficiently deliver electrical power in home electronics, industrial drives, telecommunication, transport, electric grid and numerous other applications.

ALN-PLATE

In power electronics, chip-on-heat-sink technology makes it possible to reduce thermal resistance between the heat source (chip) and the heat-sink by (depending on the design) up to a quarter of the value compared to conventional cooling system design.
Thus, ceramic heat-sinks make it possible to achieve power densities that were previously unattainable.

ceramic-heat-sinks

The best material of ceramic heat-sinks is aluminium nitride which thermal conductivity is above 170W/mk, below is the material properties.
If you have more questions, pls consult with us.

Properties		Value
Bulk Density(g/cm3)		>=3.3
Water Absorption		0
Flexural Strength(MPa)		>300
Vickers Hardness (Gpa)		11
Modulus Of Elasticity (Gpa)		>200
Dielectric Constant(1MHz)		8.8
Coefficient Linear Thermal Expansion	/℃，5℃/min, 20-300℃	4.6*10-6
Thermal Conductivity	30 degree Celsius	>=170
Volume Resistivity(Ω.cm)	20 degree Celsius	>1014
	300 degree Celsius	109
	500 degree Celsius	107
Dielectric Strength(KV/mm)		15-20
Remark: The value is just for review, different using conditions will have a little difference.

One of The Ideal Material For Heat Dissipation – Beryllium Oxide (BEO)

Distinguished by its excellent thermal conductivity, Beryllium Oxide is an ideal material for applications requiring large heat dissipation as well as dielectric and mechanical strength. It is particularly well suited for use as a diode laser and semiconductor heat sinks and as a rapid thermal transfer medium for miniaturized circuitry and tightly contained electronic assemblages.

Beryllium Oxide BeO ceramic heatsinks

Properties of Beryllium Oxide (BeO) ceramic:

Beryllium oxide(Beo) B-99 Properties
Item	Value
Dielectric Constant	6.9±0.4（10GHz）
Tangent of Dielectric loss	≤4×10-4（1MHz）
Tangent of Dielectric loss	≤8×10-4（（10±0.5）GHz）
Volume Resistivity	1011Ω·cm（300℃）
Dielectric Strength	≥20 kV/mm
Bending Strength	≥190 MPa
Density	≥2.85 g/cm3
Average Coefficient of Linear Expansion	7.98×10-6 1/K （25℃～500℃）
Thermal Conductivity	≥240 W/（m·K）（25℃）
Thermal Conductivity	≥190 W/（m·K）（100℃)
Thermal Shock Resistance	no crack
Chemical Stability	≤0.3 mg/cm2（1:9HCl）
	≤0.2 mg/cm2（10%NaOH）
GasTightness	≤10×10-11 Pa·m3/s
Average Grain Size	12～30μm
Remark: The value is just for review, different using conditions will have a little difference.

Typical applications for Beryllium Oxide (BeO) ceramic:
Heat sinks for high power electronics, laser diodes, and advanced avionics.
An ideal refractory material which can be used for both nuclear reactors and very high temperature furnace applications.
Other application in aerospace, defense, laser, medical, nuclear.
Please contact us if you would like to discuss how we can best help you solve those thermal management issues calling for higher performance in your project or new design applications.

New functional ceramic materials

New functional ceramic materials are dielectric materials with electrical, magnetic, optical, acoustic, thermal, mechanical, chemical or biological functions. There are many types of functional ceramic materials and a wide range of uses, mainly including ferroelectric, piezoelectric, dielectric, pyroelectric New ceramic materials with different functions such as semiconductor, electro-optic and magnetic.

zirconia ceramics

New functional ceramic materials are important basic materials in modern high-tech fields such as electronic information, integrated circuits, mobile communications, energy technology, and national defense. Functional ceramics and their new electronic components play an important role in the development of the information industry and the enhancement of comprehensive national strength. strategic significance.

alumina porous ceramic

1.Semiconducting Ceramics
Semiconductor ceramics refer to polycrystalline ceramic materials formed by ceramic technology. Unlike polycrystalline semiconductors, semiconductor ceramics have a large number of grain boundaries, and the semiconductorization of grains is completed during the sintering process, so they have rich material microstructures. state and various process conditions, especially suitable for sensitive materials. In addition to semiconductor grain boundary ceramic capacitors, the sensitive materials currently used mainly include heat-sensitive materials, voltage-sensitive materials, photosensitive materials, gas-sensitive materials, moisture-sensitive materials, etc.
2.Magnetic ceramic material
Magnetic ceramics mainly refer to ferrite ceramics, which are composite oxides mainly composed of iron oxide and other iron or rare earth oxides. Ferrites are mostly semiconductors, and their resistivity is much higher than that of general metal magnetic materials. It has the advantage of small eddy current loss, and has been widely used in high-frequency and microwave technology fields, such as radar technology, communication technology, space technology, electronic computers, etc.
3.High temperature superconducting ceramics
High-temperature superconducting ceramics refer to functional ceramic materials that have a higher superconducting temperature than metals. Since the major breakthrough in the research of superconducting ceramics in the 1980s, the research and application of high-temperature superconducting ceramic materials have attracted much attention. In the past ten years, my country’s research in this area has been at the advanced level in the world. At present, the application of high-temperature superconducting materials is developing towards high-current applications, electronics applications, and diamagnetism.
4.insulating ceramic
Insulating ceramics refer to ceramic materials used in electronic equipment for installation, fixing, support, protection, insulation, isolation and connection of various radio components and devices. Insulating ceramics are required to have high volume resistivity, small dielectric coefficient, low loss factor, High dielectric strength, corrosion resistance and good mechanical properties.
Insulating ceramics are widely used in circuit substrates, packaging, high-frequency insulating porcelain and other industries. The main components include insulators, spark plugs, resistor base materials and integrated circuit substrates.
5.Dielectric Ceramics
Dielectric ceramics, also known as dielectric ceramics, refer to functional ceramics that have polarization ability under the action of an electric field and can establish an electric field in the body for a long time. Dielectric ceramics have high insulation resistance, high withstand voltage, small dielectric constant, dielectric Low loss, high mechanical strength and good chemical stability, mainly used in capacitors and microwave circuit components.
Dielectric ceramics include ceramic dielectric materials such as ferrodielectric ceramics, semiconductor dielectric ceramics, high-frequency dielectric ceramics, and microwave dielectric ceramics.
6.Nano functional ceramics
Nano-functional ceramics are new functional ceramics with antibacterial, activation, adsorption, and filtration functions used in air purification and water treatment. mineralization function.
7.Piezoelectric Ceramics
Piezoelectric ceramics refer to the ferroelectric ceramics which are formed by mixing oxides (zirconium oxide, lead oxide, titanium oxide, etc.) at high temperature and sintered at high temperature and reacted in solid state, and which have piezoelectric effect through direct current high voltage polarization treatment. The collective name of piezoelectric ceramics is a functional ceramic material that can convert mechanical energy and electrical energy. Due to its good mechanical properties and stable piezoelectric properties, piezoelectric ceramics are an important force, heat, electricity, and light-sensitive functional material. , has been widely used in sensors, ultrasonic transducers, micro-displacers and other electronic components.
Commonly used piezoelectric components include sensors, gas igniters, alarms, audio equipment, medical diagnostic equipment and communications, etc. The usual piezoelectric material is PZT, and the new piezoelectric ceramic materials mainly include: high-sensitivity, high-stability piezoelectric ceramic materials , electrostrictive ceramic materials, pyroelectric ceramic materials, etc.
8.Transparent functional ceramic
Transparent functional ceramic material is an optically transparent functional material. In addition to having all the basic characteristics of general ferroelectric ceramics, it also has excellent electro-optic effects. Through the control of components, it can present electrically controlled birefringence effects, electrically controlled light scattering Effect, electronically controlled surface distortion effect, electrostrictive effect, pyroelectric effect, photovoltaic effect and photostrictive effect, etc.

alumina-ceramic-components

Transparent ceramics can be made into electro-optic, electro-mechanical military and civilian devices for various purposes: optical switches for optical communications, optical attenuators, optical isolators, optical storage, displays, real-time display pagers, optical fiber docking Micro-displacement drivers, light intensity sensors, optical drivers, etc. used in optical fiber splicing and optical attenuators.

Boron-Nitride-Ceramic-Components

With the rapid development of material science, various new properties and new applications of functional ceramic materials are constantly being recognized by people. Functional ceramics have been widely used in energy development, space technology, electronic technology, sensing technology, laser technology, optoelectronic technology, infrared technology , biotechnology, environmental science and other fields are widely used. Functional ceramics are also developing in the direction of high performance, high reliability, multi-function, miniaturization and integration.

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