News | INNOVACERA

Porous ceramic chuck table used in semiconductor equipment

Porous ceramic chuck table is a so important part in semiconductor equipment such as silicon wafer processing.

Porous Ceramic Vacuum Chucks are widely used as important components of equipment in silicon wafer, semiconductor compound wafer, piezoelectric ceramic, glass, LED, semiconductor package component substrate, optical component thinning, cutting and so on.

The advantages include the following:

Strong permeability: Uniform air permeability and water permeability to ensure the uniform stress and firm adsorption of the silicon wafer, so that it does not slip during the grinding process.
Compact and uniform structure: Due to the dense and uniform microporous ceramic, the chuck table is not easy to adsorb silicon powder abrasives and is easy to clean.
High strength: No deformation during grinding, to ensure that the silicon wafer is uniformly stressed at all points during grinding, and is not easy to edge breakage and debris.
Long service life: The surface shape is good, the dressing cycle is long and the dressing amount is small, so it has a long service life.
Easy to repair: There are no cracks, chips, threshing during machining.

Global DBC Ceramic Substrate Market Is Holding Great Promise

DBC (Direct Bonded Copper) substrates are composed of a ceramic insulator, Al2O3 or AlN onto which pure copper metal is attached by a high-temperature eutectic melting process and thus tightly and firmly joined to the ceramic.

DBC Ceramic Substrate Key Features:

Ceramic metallized: Ti/W, gold(Au), silver(Ag),Copper(Cu),nickel(Ni)¡Kothers & produce final circuit
Coating: 0.075um to 5mil

Ceramic Metallized substrate:
Al2O3 substrate metallized
AlN substrate metallized
Silicon wafer metallized

LED heat-dissipation ceramic substrate:
LED Al2O3 thin film substrate
LED Al2O3 thick film substrate
LED AlN thin film heat-dissipation substrate
Flip-chip substrate
The integration of the thin film, thick film, electrode plating and electroless plating processes

Application:
1. High Power LED ceramic substrate
2. Microwave (Wireless Communication & Radar)
3. Semiconductor Process Equipment
4. Solar Cell
5. Hybrid Electric Vehicles
6. Flip-chip/eutectic substrate
7. Sensor ceramic substrate

In future, the DBC ceramic substrates market will develop rapidly, driven by the demand from IGBT, automobile, CPV, aerospace and communication. The electric vehicles market will drive the DBC ceramic substrates to increase in the next ten years.

How to connect ceramic heater without lead wire to power supply?

Our PTC ceramic heater has two kinds: one is with lead wire, another is without lead wire.
But how to connect the ceramic heater without lead wire to the power supply?
Please let me explain it to you.
As you can see that there is end nickel plating on the ceramic heater which can connect to the power supply using the way of Contact shrapnel:
Just like our battery remote control, there are positive and negative electrodes, and we connect them with a metal spring plate.
When the battery goes in, the spring plate deforms, we connect it.

Attached is the video for your reference.

Ceramic guide rollers-high hardness better than metal

Guide rollers are used in the process of manufacturing metal wire. Since the wire travels at high speeds, high levels of tension act on the guide rollers and wear down their surface. As a result, there was a need to replace components frequently. Therefore, this requires that guide rollers have a high degree of hardness as well as have a smooth surface.

Metal components had conventionally been used in guide rollers. However, since their surface tends to wear through contact with the metal wire, surface roughness would worsen. This surface roughness on the guide rollers would then scratch the metal wire when coming in contact, thus affecting product quality.

By switching to ceramics, which are harder than metals, there was less occurrence of scratching as a result of guide roller surface wear. This resulted in less scratching from contact between the metal wire and guide rollers, contributing to higher quality production.

Furthermore, with improved wear resistance, rollers required less frequent replacement, alleviating maintenance work.

Now the most commonly used material is zirconia, ZTA, 99% alumina.

Metallization of alumina and application

With the development of modern technology, more and more new materials used in various fields. Technical ceramics are one of them, and the most popular is alumina(Al2O3).

However, since ceramic is an insulating material, it cannot be directly connected with other components. We wanted to make it even more useful, so ceramic metallization was born out of operations.

Ceramic metallization is to firmly adhere to a layer of metal film on the ceramic surface. The main role is to realize the welding between ceramic and metal. A more advanced application is to form a circuit on the surface of the ceramic, which can not only be welded but also be used as a wire to transmit current.

Nowadays, there are many methods used to manufacture metallization, including molybdenum manganese (Mo-Mn), Gold plating, Copper plating, LAP, etc.

Innovacera metallization of alumina main material is 95% alumina and 99% alumina. We will perform ceramic surface treatment before metallization to ensure the quality of metallized products.

Therefore, there will be advantages such as precision scale, small warpage, strong bonding between metal and ceramic, dense joints between metal and ceramic, and excellent heat dissipation.

So, Alumina ceramics widely used in LED heat dissipation substrates, ceramic packages, electronic circuit substrates, and electronic and electrical components.

Application of Aluminium Nitride Ceramic

Aluminium nitride has a high heat transfer ability so that aluminium nitride is widely used in microelectronics. Aluminium nitride is non-toxic. Aluminium nitride is treated with metal and can replace alumina oxide for a large number of electronic instruments.

(1) Refractory materials. Aluminium nitride is not only resistant to high temperature, corrosion, alloys and metals such as aluminium and iron, but also non-wetting with silver, copper, aluminium, lead, etc., and can be used to make refractory materials or coatings for crucibles as surface protection material. It can also be made into structural materials such as casting moulds and crucibles.

(2) Electronic substrate material. Aluminium nitride ceramics are widely used in multi-chip modules in microwave power amplifiers, and laser diode carriers, LED heat sink substrates and high-temperature semiconductor packages in civilian fields. Aluminium nitride substrates are also widely used in electric and gas hybrid automobiles — aluminium nitride ceramic carrier substrate for power module circuits. The use of aluminium nitride as the LED packaging material has the following advantages: Good heat resistance and thermal conductivity, which can increase the service life of the material; Can make a thinner packaging material.

: edf

Machinable Glass Ceramic Insulating Bar for Medical Applications

machinable glass ceramic insulating bar

This ceramic bar is used for processing of insulators on Medical devices.

Machinable Glass Ceramic has a continuous use temperature of 800℃ and a peak temperature of 1000℃. Its coefficient of thermal expansion readily matches most metals and sealing glasses. It processes good machinability and can be lathed, milled, planed, ground, bored, incised and threaded. It also has the advantages of insulation, pore-free, high/low-temperature resistant, acid and alkali resistant and thermal impact resistant.

It is widely used for microwave high vacuum insulation, high precision magnetism-free skeleton for aeronautic and astronautic electrical devices, ultra-high voltage insulation for electric motors and structural parts at strong erosion environments. In terms of machinability, it can take place of aluminium oxide and boron nitride ceramics that are difficult to machine.

Stock size of rods
φ10*100mm; φ15*100mm; φ20*150mm; φ25*150mm; φ30*150mm; φ35*150mm; φ40*150mm; φ45*150mm; φ 100*100mm ; φ50*150mm; φ55*150mm; φ60*100mm; φ65*100mm; φ70*100mm; φ75*100mm; φ80*100mm; φ85*100mm; φ90*100mm; φ105*100mm;φ110*100mm
φ4 ×300 mm; φ6 ×300 mm; φ8×300 mm; φ10×300 mm; φ12×300 mm; φ16 ×300 mm; φ21 ×300 mm
φ26×300 mm; φ30 ×300 mm; φ8×300 mm; φ50×300 mm

machinable glass ceramic components show

Customized design will be available for INNOVACERA

Increase Thickness of Ceramic Insulator Layer

To increase the compressive strength, INNOVACERA increases the thickness of the ceramic insulator layer
from 0.38mm to 0.50mm for a high power heater tube. (Such as 90105 series).

Pls check as below picture:

This time, a total of 0.12mm of ceramic insulation layer thickness increased, and other production processes and manufacturing techniques remained unchanged, with no negative impact on the product.

The appearance of the product is changed as follows for reference.

The change will begin from Jan. 2020，please note!

Where are aluminum nitride ceramics used?

With the development of the electric components, smaller but better performance and lower energy cost elements are pressing demand. The high dense, high power, and a high-frequency component may generate as much as 100W/cm2 heat, such as high bright LED, MOSFET, IGBT, and laser elements. The longer those elements work, the more the heat accumulated. Due to the limited room in the package, if the heat could not have been diffused in time, it would highly affect the elements’ life, performance, and reliability. So, it is important to introduce a good cooling package design and high thermal conductivity ceramic materials into these industries.

Different applications in general

High brightness high power LED
Microwave wireless communication and semiconductor equipment
Automobile
Energy
IGBT Module
IPM Module

Ceramic Heater – The Secret of Keeping The Intelligent Toilet Lid Warm

When you are in Japan, you must know that the intelligent toilet is trendy, because there is one unforgettable and very human function which is the heating function. Today I will tell you the secret of keeping the intelligent toilet lid warm. Actually, it is a ceramic heater.

At present, the heating function of the intelligent toilet lid is the following: 1. Warm buttock washing function, female washing function and reciprocating cleaning function all need water heating; 2 toilet seat heating function; 3. Realise the purpose of paperless warm air drying for toilet, and the realisation of these functions requires the support of heating components.

1. The current heating mode of intelligent toilet is two kinds. One is thermal storage type another is the instantaneous water heater.
The thermal storage type is the most mainstream way of heating in an early time. It is similar to the water heater. In the intelligent toilet back, there is a storage tank, which will deposit a certain amount of water, after the heating, the water temperature will drop to natural, and when it drops to a specific temperature, the seat will heat again at a constant temperature. Because of the hot water reserves and heating speed is limited, users will feel the water temperature is not stable. And instantaneous water heater type is to heat the water flow direction, so it can avoid breeding bacteria and harm the water quality due to long-term storage of water, and more healthy.

2. The heating body of the core component of the intelligent toilet generally adopts a ceramic heating body, and the preparation cost is also relatively high. At present, the common ceramic heating elements include MCH ceramic heating element and PTC ceramic heating element.

PTC ceramic heating body: ceramic PTC is composed of barium titanate (or strontium, lead) as the main component, with a small amount of rare earth (Y, Nb, Bi, Sb), acceptor (Mn, Fe) elements, as well as glass (silica, alumina) and other additives, sintered semiconductor ceramics. PTC heating element is using PTC ceramic heating element and aluminium tube. This type of PTC heating element has the advantages of small thermal resistance and high heat exchange efficiency. The outstanding characteristic lies in the safety performance, under any application will not produce such as the electric heat pipe heater surface “redness” phenomenon, thus causing scald, fire, and other safety hazards.

MCH ceramic heating element: MCH is the abbreviation of Metal Ceramics Heater, which means cermet heating element. The MCH ceramic heating element is by sintering the electric heating element and the ceramic at a high temperature to form a ceramic heating element.

Generally, metal tungsten or molybdenum-manganese paste is printed on the ceramic casting body, laminated by hot pressing, and then protected by a hydrogen atmosphere at 1600°C. The ceramic and metal sinter together to form a ceramic heating body. The advantages of the MCH heater are corrosion resistance, high-temperature resistance, long life, high energy efficiency, uniform temperature, good thermal conductivity, and fast thermal compensation Environmental requirements. And it does not contain harmful substances, comply with EU RoHS and other environmental conditions. MCH ceramic heating element is a new type of high-efficiency ecological protection and energy-saving ceramic heating element. Compared with the PTC ceramic heating element, it can save 20-30% of electricity under the same heating effect, and there is no massive problem of power attenuation of PTC for a long time.

There are mainly two types of ceramics used in MCH ceramic heating elements: alumina ceramics and silicon nitride ceramics. These two ceramic materials are the most widely used in the field of electric heating elements. Both have excellent high temperature and acid and alkali resistance. However, silicon nitride ceramics have greater hardness and higher production costs than alumina ceramics. Therefore, the ceramic heating bodies currently on the market are mainly alumina, including the alumina ceramic materials, including the template drawings attached to the context.