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Boron nitride crucible application-electron beam evaporation

In semiconductor manufacturing, boron nitride can be used as an etching agent and thin film deposition raw material, acting as a protective layer to prevent damage or contamination of the device.

In addition, boron nitride can also be used as an electron beam evaporation source material for the preparation of various thin film materials.

For example: Electron beam evaporation coating conductive boron nitride crucible (BN crucible) – for thin film deposition equipment.

Conductive boron nitride crucibles are high-purity smooth crucibles designed for electron beam evaporation coatings.

It has excellent high-temperature resistance and thermal cycling properties, and will not react with various metals and ceramic rare earths.

Even under rapid heating and cooling conditions, the crucible remains intact.

It can be used for alloy melting, rare earth and ceramic sintering, and electron beam evaporation coatings.

It is commonly used in thermal evaporation processes such as high-frequency induction heating, coatings, electron beam evaporation coatings, aluminum, and silicon plating.

Conductive boron nitride crucibles offer high purity, high finish, and excellent electron beam evaporation coating properties.

They increase evaporation rates, accelerate material changeovers, improve thermal stability, and reduce power requirements, ultimately increasing productivity and cost-effectiveness.

Advantages:

good film finish, high purity, less pollution, long service life.

1.Excellent resistance to high temperatures and heat cycling.

It has a low rate of thermal expansion and is resistant to wetting of most molten metals.

2.Heat-resistant up to 2000°C, boron nitride does not react with aluminum and is not volatile.

3.increase evaporation rate; Increasing the evaporation rate results in shorter cycle times and higher overall yields.

4.Rapid material change; Conductive boron nitride crucibles facilitate rapid material changes, minimize furnace chamber downtime, and improve process efficiency.

5.enhanced thermal stability; These crucibles have higher thermal stability, reducing heat transfer from the crucible itself, ensuring consistent and controllable evaporation.

Main ingredients: BN+TiB2

Density 3.0g/cm3

Binding composition: B2O3

Color: Grey

Room temperature resistivity: 300-2000 Ω·cm

Operating temperature: below 1800℃

Thermal conductivity: > 40W/mk

Coefficient of thermal expansion: (4-6) x10-6K

Bending strength: > 130Mpa

Evaporation rate: 0.35-0.5g/min·cm2

Ceramic Screwdriver Specialized Tool For Semiconductor Manufacturing

Ceramic screwdriver is a specialized tool designed for adjusting and aligning components in sensitive electronic equipment. The ceramic alignment screwdriver is made of high-quality ceramic materials such as alumina ceramic (Al₂O₃) and zirconia ceramics, which have several advantages.

Ceramic materials is Anti-static, non-magnetic, and non-inductive and resistant to corrosion.

Zirconia Ceramic can withstand high temperatures, making these screwdrivers suitable for use in environments where heat is a factor.

Ceramic screwdriver Properties:

Technical Parameter	Technical Item
Technical Parameter	Major content		Zro2
Physical Properties	Density	g/cm3	≥6.0
Physical Properties	Water absorption	%	0
Mechanical Properties	Hardness	HV	1400
	Bending Strength	Kgf/mm2	11.000
	Compressive Strength	Kgf/mm2	25.000
Temperature Properties	Thermal Expansion Coefficient	℃	9.5*10^-6
	0-1000℃	℃	9.5*10^-6
	Thermal Shock Resistance	T（℃）	360.000
	Thermal Conductivity	W/m.k(2 5℃.300℃	3.000
	Volume Resistance Rate	cm	…
	20℃		>10 ¹²
	100℃		…

Application:

Semiconductor Manufacturing
Precision Electronics
Telecommunications
Any application requiring high precision and sensitivity to electrical or magnetic interference

Ceramic alignment screwdriver regular size:

Type	Ceramic Size(mm)	Total Length(mm) Not included cap
Flathead screwdriver	0.4*0.9	122MM
	0.4*1.2
	0.4*1.8
	0.4*2.0
	0.7*2.4
Cross-head screwdriver	1.2
Cross-head screwdriver	1.7

Ceramic Parts For Electron Generator Components

Innovacera recently are researching and developing to produce alumina ceramic (Al₂O₃) parts for Electron Generator Components.

Electron generator components are essential devices or parts used to generate, control, and direct electron flows. These components are crucial in semiconductor manufacturing and various high-tech applications.

Ceramic parts play a crucial role in electron generator components due to their excellent electrical insulation, thermal stability, and resistance to high temperatures and corrosion. Here are some key ceramic parts used in electron generator components.

CeramicInsulators
Ceramic filaments
Ceramic feedthroughs
Vacuum Chambers
Electron Emission Sources
Support Structures
Ceramic heat shields
Ceramic capacitors
DielectricsCeramics
Electrodes

Here are the key aspects of electron generator components:
1. Electron Gun

Function: Generates and emits an electron beam, commonly used in electron microscopes, electron beam lithography equipment, and electron beam welding.
Components: Cathode (heated to emit electrons), grid (controls the intensity of the electron beam), and anode (accelerates the electrons).

2. Power Supply

Function: Provides a stable current and voltage to drive the electron gun and maintain its normal operation.
Characteristics: High stability, low noise, precise control.

3. Focusing System

Function: Uses electromagnetic or electrostatic lenses to focus the electron beam, achieving the required precision and resolution on the target area.
Components: Electromagnetic lenses, electrostatic lenses.

4. Deflection System

Function: Controls the direction of the electron beam to precisely position it on the target surface.
Components: Deflection coils or deflection electrodes.

5. Vacuum System

Function: Provides and maintains the high vacuum environment necessary for the electron generator to operate, reducing collisions between electrons and gas molecules.
Components: Vacuum pumps, vacuum chamber.

6. Cathode Materials

Function: Serve as the source material for electron emission, typically requiring high electron emission efficiency and high-temperature resistance.
Common Materials: Tungsten (W), WF6, LAB6.

7. Insulation and Shielding Components

Function: Prevents electron beam leakage and protects equipment and operators from radiation damage.
Materials: Ceramics, glass, metal shielding.

8. Cooling System

Function: Dissipates heat, ensuring that the various parts of the electron generator operate within a safe temperature range.
Components: Liquid cooling systems, air cooling systems.

Applications

Semiconductor Manufacturing: Electron beam lithography, etching, and inspection.
Materials Science: Electron microscopes (SEM, TEM) for material structure analysis.
Medical Equipment: Radiation therapy devices.
Industrial Processing: Electron beam welding, cutting.

Electron generator components precisely control the generation, focus, and deflection of electron beams, these components support a wide range of complex manufacturing and analysis processes.

Electrical Insulation Alumina Ceramic Parts For Implanter Semiconductor Process Equipment

Alumina ceramic parts are widely used in semiconductor process equipment due to their excellent electrical insulation properties, high thermal conductivity, and mechanical strength. In semiconductor manufacturing, alumina ceramic parts are particularly important in implanter equipment.

Implanter Equipment uses in ion implantation, a critical process in semiconductor fabrication where ions are accelerated and implanted into a substrate to modify its properties.

Alumina Ceramic Parts in implanter using including insulators, wafers, and support structures, all designed to withstand high temperatures and corrosive environments typical of ion implantation processes:

Ceramic Wafer Carriers: Hold and support wafers during ion implantation.
Ceramic Insulator Rings: Prevent electrical leakage and ensure safety.
All kinds of Feedthroughs: Provide pathways for electrical signals while maintaining vacuum integrity.

Alumina Ceramic Parts Advantages:

High Electrical Insulation
Preventing electrical leakage and ensuring safety in semiconductor processes
Good Thermal Conductivity
Preventing overheating of semiconductor components
Excellent Mechanical Strength
Resistant to wear and abrasion
Ensuring longevity and durability in demanding semiconductor environments
Chemical stability and resistance to corrosion.
Can be Machined to super high precision tolerances
Ensuring precise and reliable performance in semiconductor applications
Non-reactive with other materials used in semiconductor processes

99.5% Alumina Ceramic Parts Properties:

Alumina Ceramic Material Properties
Properties	Value
Main Composition	Al2O3>99.5%
Density	>3.95
Hardness (Gpa)	15~16
Room Temperature Electric Resistivity (Ω·cm)	>10 ¹⁴
Max Using Temperature(℃）	900.00
Three-Point Bending Strength (MPA)	450.00
Compressive Strength (MPA)	45.00
Young modulus (Gpa)	300-380
Thermal Expansion Coefficient(20-1000℃)(10-6/K)	6~8
Thermal Conductivity (W/m·k)	30.00
Dielectric strength(kv/mm)	18.00
Dielectric constant	9~10
Dielectric loss angle (*10-4)	2.00
Surface Roughness	<Ra0.05um
Remark: The value is just for review, different using conditions will have a little difference.

The use of alumina ceramic parts in semiconductor process equipment, especially in implanters making alumina ceramic material to become an indispensable material in the semiconductor industry. Alumina implanter ceramic parts such as alumina ceramic base and alumina ceramic nozzles ensure the reliability, precision, and long service life of semiconductor manufacturing processes.

Aluminum Nitride/Boron Nitride Composite BN-AlN Ceramic Parts for Ion Source

BN-AlN Ceramic is made by sintering Boron Nitride (BN) and Aluminum Nitride (AIN) powder. It has excellent electrical insulator, thermal conductivity, high strength, resistance to thermal shock, and strong resistance to halogen gas plasma, which is offers a wide range of applications, including components for semiconductor production equipment and components that require effective heat dissipation.

The ion source is a device that creates atomic and molecular ions, which is in the vacuum chamber. Aluminum Nitride/Boron Nitride Composite has excellent electrical insulator, thermal conductivity, sealing ability to vacuum and hasn’t given off much gas. So it is plays an heat sinks and thermal transfer plate role in ion sources.

Material Advantages:

High mechanical strength.
High thermal conductivity.
Low thermal expansion.
Low dielectric loss.
Excellent electrical insulation.
High corrosion resistance–non-wetted by molten metals.
Excellent Machinabilit–BN-AlN can be machined to high-precision complex shapes.
It has excellent sealing ability to vacuum and hasn’t given off much gas.
High-frequency wave properties, allow visible infra-red light to pass through easily.

Material Properties:

Properties	Units	BAN
Main Composition	/	BN+ALN
Color	/	Greyish- Green
Density	g/cm3	2.8~2.9
Three-Point Bending Strength	MPa	90
Compressive Strength	MPa	220
Thermal Conductivity	W/m·k	85
Thermal Expansion Coefficient (20-1000℃)	10-6/K	2.8
Max Using Temperature	In Atmosphere ℃	900
	In Inactive Gas ℃	1750
	In High Vacuum ℃	1750

Applications

Heat sinks
Vacuum components
Components where low dielectric constant and dissipation factor are required
Parts and components where a low coefficient of thermal expansion is required
Electronic components where electrical insulation and heat dissipation are required
Electric propulsion discharge channels for Hall Effect Thrusters

INNOVACERA provides a series of Boron Nitride composites, we provide our customers with a lot of solutions. If you’re looking for a high heat sinks solution for your application, please get in touch with us to learn more about our full range of products and how we can help you meet your thermal management needs.

Orifice Plate Introduction- The Opening Where Ions Enter The Mass Spectrometer

The orifice plate is the opening where ions enter the mass spectrometer, which is one the of key component in the mass spectrometer.

The fuction of the orifice plate is with a voltage applied to it and to help preventing ions from clumping together.

The good orifice plate should included below factors

1.Detachable heater
It is using MCH heater which is the abbreviation of metal ceramic heaters.
It refers to a ceramic heating element in which a meta tungsten or molybdenum manganese paste is printed on a ceramic casting body and laminated by hot pressing and then co-fired at 1600°C, in a hydrogen atmosphere to co-sinter ceramic and metal.

MCH ceramic heating element is high-efficiency, environmentally friendly, and energy-saving.

MCH Heater has below advantages
Energy-saving, high thermal efficiency, unit heat power consumption is 20-30% less than PTC;

The surface is safe and non-harged, with good insulation performance, can withstand the withstand voltage test of 4500V/1S, no breakdown, and leakage current <0.5mA;

No impulse peak current; no power attenuation; rapid heating; safe, no open flame;

Good thermal uniformity, high power density, and long service life.

The most important is for heating evenly, so MCH heater perform very good in this factor.

The detachable heater design in orifice plate is very economical and practical, and when the heater fails, it can be easily replaced and used, saving the cost and time of replacement.

2.Precision size of the center hole

The important requirement is the center hole should be very small and high precision to 300-600um, depend on different requirement, the size of the center hole will be measured by a quadratic instrument before shipment.

3.With heating resistance and sensor resistance
Electrical performance test before shipment, including on-voltage test, heating resistance test, sensor resistance test, generally resistance tolerance does not exceed +/-10%.

Innovacera is providing customized design of the orifice plate also repairing for the standard model like Sciex 4000/4500/5000 etc.

INNOVACERA’s many years of experience in metallization and ceramic-to-metal sealing production enable us to provide solutions according to your requirements. Our ceramic-to-metal components and analytical instruments components ideal for use in high vacuum, High voltage, and high-pressure applications.

If you need more information, pls contact with us.

Features and Benefits of Boron Nitride Ceramic Evaporation Boat Sets

In the vast landscape of advanced materials, Boron Nitride Ceramics (BNCs) stand out as a remarkable class of compounds renowned for their exceptional thermal stability, chemical inertness, and lightweight properties. Among the myriad applications that leverage these unique characteristics, Boron Nitride Ceramic Evaporation Boat Sets have emerged as indispensable tools in high-temperature processing industries, particularly in the fields of semiconductor manufacturing, vacuum metallization, and advanced coating technologies.

The Essence of Boron Nitride Ceramics
Boron Nitride (BN), a compound of boron and nitrogen, exists in various crystalline forms, each with distinct properties. Among them, hexagonal boron nitride (h-BN) and cubic boron nitride (c-BN) are the most commonly utilized in ceramic applications. BNCs, particularly those made from pyrolytic processes, exhibit unparalleled resistance to extreme temperatures, making them ideal candidates for use in environments where conventional materials would fail.

Pyrolytic Boron Nitride Ceramics: The Elite of the BNC Family
Pyrolytic Boron Nitride (PBN) Ceramics are produced through a highly specialized process involving the decomposition of a boron-containing precursor gas under high temperature and controlled conditions. This results in a dense, highly pure ceramic with exceptional thermal shock resistance and low thermal expansion coefficients. PBNCs’ ability to withstand temperatures exceeding 2000°C without significant degradation or softening makes them the material of choice for BNC Evaporation Boat Sets.

The Role of Boron Nitride Ceramic Evaporation Boat Sets
BNC Evaporation Boat Sets are precision-engineered devices designed to efficiently and uniformly deposit thin films of metals, alloys, or other materials onto substrates in vacuum chambers. These boats are typically made from PBNCs due to their superior thermal conductivity and resistance to contamination from the evaporating material. The evaporation process relies on heating the material inside the boat to a high temperature, causing it to vaporize and condense onto the target surface, forming a uniform and high-quality coating.

Advantages of BNC Evaporation Boat Sets
High-Temperature Stability: PBNC’s ability to withstand extreme temperatures ensures uninterrupted operation, even during prolonged or intensive evaporation cycles.

Chemical Inertness: The non-reactive nature of BNCs protects the boat from corrosion or contamination by the evaporating materials, ensuring purity of the final product.

Low Thermal Expansion: PBNCs’ low coefficient of thermal expansion minimizes dimensional changes during heating and cooling cycles, preserving accuracy and precision.

Longevity: The durability of PBNCs extends the lifespan of the evaporation boat, reducing maintenance costs and downtime.

Versatility: Suitable for a wide range of materials, including metals, alloys, and even some refractory compounds, making BNC Evaporation Boat Sets ideal for diverse applications.

Boron Nitride Ceramic Evaporation Boat Sets, crafted from the pinnacle of Pyrolytic Boron Nitride (PBN) Ceramics, represent a pinnacle of innovation in high-temperature processing technologies. Their unparalleled thermal stability, chemical inertness, and longevity make them invaluable assets for industries seeking precision, efficiency, and reliability in their manufacturing processes. As the demand for advanced materials and coatings continues to grow, the role of BNC Evaporation Boat Sets will only become more prominent, driving further advancements in the field of advanced ceramics and beyond.

Advanced Ceramics in Electronics and Technology

Alumina Ceramic (Al₂O₃)

Advanced Ceramics are used in electronics and technology. It has unique properties that make it serve important insulative, sensor, resistive, capacitive, magnetic functions, and electrooptic in electrical and electronic circuitry. In this article, we will explore the applications of Advanced Ceramics in Electronics and Technology.

1. Properties of Advanced Ceramics in Electronics and Technology
Advanced Ceramics are known for their excellent electrical and thermal properties. They have high thermal conductivity, which makes them ideal for heat sinks, helping to dissipate heat from electronic components. They also have high dielectric strength, which makes them suitable for electronic components such as resistors, capacitors, and insulators.

2.Advanced ceramic materials with high electrical performance
Alumina: Alumina Ceramic (Al₂O₃) are a common ceramic material used in electronic components. It has high dielectric strength, and high thermal conductivity, and is resistant to wear and corrosion.

Aluminum Nitride: Aluminum Nitride (AIN) is used in many electronic applications due to its ability to quickly dissipate heat, which makes it a more efficient material, unlike most electrical insulating materials.

Atmospheric Pressure Sintered Aluminum Nitride, like Hot Pressed Aluminum Nitride, has excellent dielectric strength properties but is specified for use in applications with extreme temperature fluctuations.

Hot Pressed Aluminum Nitride has excellent dielectric strength and excellent thermal conductivity, making it ideal for semiconductor applications.

Silicates: Silicates are Typically used in cost-effective technical applications where electrical resistivity is required.

Mullite has excellent thermal shock properties and dielectric strength. Steatite ceramics have low dielectric losses and high dielectric strength, and are inexpensive to manufacture.

Silicon Carbide (SiC): Silicon Carbide is a ceramic material used in high-power electronic devices such as power converters, inverters, and motor drives. It has high thermal conductivity, high electron mobility, and can operate at high temperatures.

3. Advantages of Ceramics in Electronics and Technology

Ceramics have several advantages over other materials used in electronics and technology. Some of these advantages include:

1. Durability: Ceramics are highly resistant to wear and corrosion, making them ideal for use in harsh environments.

2. High Temperature Resistance: Ceramics can operate at high temperatures without degradation, making them ideal for high-temperature applications.

3. High Dielectric Strength: Ceramics have high dielectric strength, which makes them ideal for use in electronic components such as capacitors and insulators.

4.High Thermal Conductivity: Ceramics have high thermal conductivity, which makes them ideal for use in heat sinks, which help dissipate heat from electronic components.

Applications of Boron Nitride in the metallurgical industry

1. Protective Materials
During the steel smelting process, it can be used as a protective material to protect metal materials.

For example, in the continuous casting process, Boron Nitride (BN) can be used as a protective slag to effectively prevent slag inclusion defects in castings and reduce the wear of the tundish and crystallizer.

In addition, BN can also be used as a filter material for molten metal to filter out impurities and gases in the metal and improve the quality and purity of the metal.

2. Thermal materials
Due to its high thermal conductivity and good thermal stability, this material can be used as a thermal material in the metallurgical industry.

For example, in the steel smelting process, BN an be used as the main material for high-temperature equipment such as crucibles and thermocouple sleeves, and has good high-temperature oxidation resistance and high-temperature strength.

In addition, it can also be used as a lining material for high-temperature furnaces to improve the service life and safety of the furnace.

Example: crucibles, boats, liquid metal delivery pipes, rocket nozzles, high-power device bases, molten metal pipes, pump parts, cast steel molds for melting and evaporating metals, manufacturing high-temperature components, rocket combustion chamber linings, spacecraft thermal shields, and corrosion-resistant parts for magnetofluid generators.

3. Heat-insulating materials
Boron nitride has very good heat insulation properties and can be used as heat insulation material in metallurgical industry.

For example, in the continuous casting and rolling production line of iron and steel enterprises, boron nitride can be used as heat insulation materials such as heat insulation plate and heat insulation sleeve, which can effectively reduce the heat exchange between high temperature billets and air, and improve the production efficiency and product quality. In addition, boron nitride can also be used as heat insulation material for high temperature furnace to reduce heat loss and energy waste.

Examples: manufacture of high temperature components, rocket combustion chamber lining, heat shielding of spacecraft, corrosion-resistant parts of magnetic current generators

4. Processing tools
Boron nitride has great wear resistance and lubricity, and can be used as machining tools in the metallurgical industry.

For example, in metal cutting processing, BN can be used as a tool coating material to improve the wear resistance and service life of the tool.

In addition, BN can also be used as abrasives, abrasives and other processing aids to improve processing efficiency and surface finish.

The feacure of Cearmic Reflector

Ceramic reflector is designed to reflect and direct light efficiently with various applications. Compared with traditional reflectors made by metals like aluminum, our ceramic reflectors are crafted by advanced ceramic materials 99 Alumina ceramic which has several advantages:

1.Optical Properties: Alumina has high reflectivity in certain wavelengths. It can control diffusion of light more precise and control over light distribution and efficiency, which makes ceramic reflectors suitable for optical systems, specialized lighting applications, and scientific instruments.

2.Thermal Stability: compared with metals, Al2O3 has higher thermal stability which can withstand much higher temperature without deforming or losing their reflective properties. It makes ceramic reflectors an ideal component where heat resistance is crucial, such as in industrial furnaces, high-intensity lighting and automotive headlight.

3.Electrical Insulation: 99 Alumina is an excellent electrical insulators. In applications where electrical conductivity of reflector could have safety risks, it requires to use an electrical insulation material like Alumina.

4.Corrosion Resistance: Alumina has an extreme corrosion resistance. This property makes it more durable and longer service life in environment exposed to chemical and moisture conditions.

The Alumina ceramic reflectors play an important role in industries where requires to use heat-resistant and robust materials with excellent electrical insulation and optical properties. It can be found the application in various industries and technologies with high strength, thermal stability, and excellent electrical insulation. Some common applications of alumina ceramic reflectors include:

＊Optical Systems
＊High-Intensity Discharge Lighting
＊Infrared Heating
＊Semiconductor Manufacturing
＊Industrial Furnaces and Kilns
＊Microwave Applications
＊High-Temperature Environments

Typical Models
• BAB – the external shape is round like BAB330-130, BAB192, BAB275, BAB350.
• ZAB – the external shape is irregular like ZAB-S04-30.
• LAK – the external shape is rectangular but one side is concave like LAK311.
• EAB – the external shape is rectangular;
• GAZ – the external shape is triangular;
• Description of part number: CRDP-XX-YY-Z-AAA-BBB

Innovacera Ceramic laser reflectors are high reflectance cavities used in solid state and CO2 laser systems. Our range of custom ceramic reflectors offer significant advantages and improvements over those made with materials such as metal and polymer, it work particularly well in Ruby and Nd: YAG laser pumping chambers and used extensively for long-life laser reflectors.

The use of ceramic reflectors represents a significant advancement. Their ability to withstand high temperatures, resist corrosion, and maintain reflective efficiency makes them invaluable in applications ranging from optical systems to semiconductor industry. Moreover ceramic reflectors contribute to sustainability by improving energy efficiency and reducing maintenance costs over the long term.